Effects of growth conditions on the quality of B-doped graphene films

Y. You,C. Wang,Y. L. Xu,J. X. Wan,W. Ren,X. H. Fang,X. Y. Chen
DOI: https://doi.org/10.1063/1.4974010
IF: 2.877
2017-01-14
Journal of Applied Physics
Abstract:Boron-doped graphene (B-doped graphene) films with large area, high quality, and good uniformity are successfully prepared by chemical vapor deposition using ethylboronic acid (C2H7BO2) as the sole precursor. The pre-treatment of the copper foil and post-annealing are introduced to the growth process and proved to be greatly influential to the quality of B-doped graphene. The films prepared are mainly monolayer with the transmittance of about 97.1%, the B/C ratio of about 2.3%, the sheet resistance of 1.5–3 kΩ/◻, and the carrier density of 1.13 × 1013 cm−2 at room temperature.
physics, applied
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