Performance Improvement of Spacer-Engineered N-Type Tree Shaped NSFET Toward Advanced Technology Nodes

Ummadisetti Gowthami,Asisa Kumar Panigrahy,Depuru Shobha Rani,Muralidhar Nayak Bhukya,Vakkalakula Bharath Sreenivasulu,M. Durga Prakash
DOI: https://doi.org/10.1109/access.2024.3388504
IF: 3.9
2024-05-03
IEEE Access
Abstract:Tree-shaped Nanosheet FETS (NSFET) is the most dependable way to scale down the gate lengths deep. This paper investigates the 12nm gate length (LG) n-type Tree-shaped NSFET with the gate having a stack of high- dielectric (HfO2) and SiO2 using different spacer materials, which can be done using TCAD simulations. The Tree-shaped NFET device with nm, nm, nm, and nm has high on-current ( ) and low off-current ( ). The 3D device with single- and dual-k spacers are compared and its DC characteristics are shown. It is noted that the dual- device achieves the maximum ratio, which is , compared to because the fringing fields with spacer dielectric lengthen the effective gate length. Additionally, the impact of work function, interbridge height, width, gate lengths, and temperature, along with the device's analog/RF and DC metrics, is also investigated in this paper. Even at 12 nm LG, the proposed device exhibits good electrical properties with DIBL =23 mV/V and SS =62 mV/dec and switching ratio ( . The device's performance confirms that Moore's law holds even for lower technology nodes, allowing for further scalability.
computer science, information systems,telecommunications,engineering, electrical & electronic
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