Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Ziba Torkashvand,Farzaneh Shayeganfar,Ali Ramazani
DOI: https://doi.org/10.3390/mi15020175
IF: 3.4
2024-01-24
Micromachines
Abstract:The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
What problem does this paper attempt to address?
### Problems Addressed by the Paper The paper primarily explores the novel functionalities and high sensitivity characteristics of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) devices based on two-dimensional (2D) materials. Specifically: 1. **Application of New Materials**: - Investigates the new functionalities and higher sensitivity of MEMS and NEMS devices based on 2D materials compared to traditional silicon-based devices. 2. **Enhancement of Sensor Performance**: - Explores how integrating suspended 2D membranes into MEMS and NEMS devices can improve the performance of devices such as mass sensors, gas sensors, accelerometers, pressure sensors, and microphones. 3. **Material Preparation Methods**: - Discusses in detail the preparation methods for 2D materials used in MEMS and NEMS devices, including chemical vapor deposition (CVD), physical vapor deposition (PVD), mechanical exfoliation, liquid phase exfoliation (LPE), and molecular beam epitaxy (MBE). 4. **Material Characterization**: - Describes various methods used to characterize micro and nanostructures, such as scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), optical spectroscopy, scanning tunneling microscopy (STM), and atomic force microscopy (AFM). 5. **Mechanical Properties Study**: - Investigates the mechanical properties of nanostructures, which are crucial for designing practical MEMS/NEMS devices, and introduces various experimental testing methods such as hardness testing, elastic modulus testing, fracture toughness testing, scratch resistance testing, and bending testing. 6. **Device Operation Principles**: - Analyzes the operating principles and functionalities of MEMS and NEMS devices, including optical detectors, electrical detectors, infrared detectors, and mass sensors. Through these studies, the paper aims to promote the application and development of MEMS and NEMS devices based on 2D materials in various fields.