A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Abdullah Saleh Algamili,Mohd Haris Md. Khir,John Ojur Dennis,Abdelaziz Yousif Ahmed,Sami Sultan Alabsi,Saeed Salem Ba Hashwan,Mohammed M. Junaid

DOI: https://doi.org/10.1186/s11671-021-03481-7

2021-01-26

Nanoscale Research Letters

Abstract:Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology