A ridge waveguide constructed by H+ implantation and precise diamond blade dicing in high-gain Nd3+-doped laser glass

Chun-Xiao Liu,Jia-Li You,Shuo-Qi Lin,Jing-Yi Chen,Min Tang,She-Bao Lin,Rui-Lin Zheng,Li-Li Fu,Liao-Lin Zhang
DOI: https://doi.org/10.1016/j.ijleo.2020.165881
IF: 3.1
2021-01-01
Optik
Abstract:<p>Ion implantation and precise diamond blade dicing are amazing tools allowing the accurate formation of waveguide structures. In this work, we report on the fabrication and assessment of a ridge waveguide in the high-gain Nd<sup>3+</sup>-doped laser glass by the 400-keV H<sup>+</sup>-ion implantation with a fluence of 8.0 × 10<sup>16</sup> ions/cm<sup>2</sup> and the precise diamond blade dicing at a rotating speed of 2.0 × 10<sup>4</sup> rpm. The relative atom displacement induced by the proton implantation was simulated by the SRIM 2013. The cross section of the two-dimension structure was captured by a microscope and its lateral dimensions were 3.75 μm × 10 μm. The optical confinement of the ridge waveguide was recorded by the technique of the end-face coupling and its propagation loss was about 3.9 dB/cm at 976 nm. The ridge waveguide supported mono-mode at 976 nm can serve as a photonic device.</p>
optics
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