Abstract:Ventilation and air distribution systems for cleanrooms in electronic industry have been overdesigned. Reducing the air supply volume of fan filter units (FFUs) is considered an energy saving measure. However, little is known about the particle removal performances after reduction in air supply volume. In this study, experiments were conducted in a chamber to investigate the effects of reducing air supply volume on the characteristic of particle distribution. The experiments were based on three FFU speed ratios (80%, 50%, and 40%) and four particle source locations (source in the subzone with and without an FFU at the heights of 1.5 m and 1.0 m) at two FFU area ratios (50% and 25%). The results were analyzed using the dimensionless particle concentrations (with respect to ideal mixing condition) in sixteen subzones within the experimental region. It was concluded that (1) the containment effect of air distribution on particle lateral dispersion was weakened with the decrease of air supply volume for FFU area ratios of both 50% and 25%; (2) most subzones have been well protected at an FFU area ratio of 50% (with dimensionless concentrations far below 0.2) regardless of the source location, and at an FFU area ratio of 25% (with dimensionless concentrations far below 0.5) for the particle source under an FFU supply airflow. However, the containment effect has been poor at an FFU area ratio of 25% for the particle source not under an FFU supply airflow regardless of the air supply volume; (3) the working face at a height of 1.0 m was slightly more affected for a source height of 1.5 m compared with a source height of 1.0 m at an FFU area ratio of 50%, while there was no significant difference in the particle removal for both source heights at an FFU area ratio of 25%; and (4) the air supply volume could be reduced by 46.7% (0.2 as the critical value) and 43.8% (0.5 as the critical value), respectively for FFU area ratios of 50% and 25% from the perspective of air distribution effectiveness. This study improves the understanding of characteristics of reduced airflow in cleanrooms.

Analysis and Experiments on the Characteristics of Airflow and the Air Cleanliness Protection Region under Fan Filter Units in Cleanrooms

Experimental Investigation of Particle Dispersion in Cleanrooms of Electronic Industry under Different Area Ratios and Speeds of Fan Filter Units

Experimental Characterization of Particle Distribution During the Process of Reducing the Air Supply Volume in an Electronic Industry Cleanroom

The development of fan filter unit with flow rate feedback control in a cleanroom

Control strategy of fan filter units in cleanroom considering of the moving personnel

Numerical Comparison of the Efficiency of Mixing Ventilation and Impinging Jet Ventilation for Exhaled Particle Removal in a Model Intensive Care Unit

Indoor Airflow and Pollutant Spread Inside the Cleanroom with Micro-Porous Supplying Panel and Different Ventilation Schemes: Analytical, Numerical and Experimental Investigations

Experimental and CFD Airflow Studies of a Cleanroom with Special Respect to Air Supply Inlets

Capturing Energy-Saving Opportunities in Air-Supply System for Cleanroom with Non-Unidirectional Airflow

Application of FFU Ventilating Mode in Purifying Air-Conditioning System

Full-scale evaluation of FFU configurations in an optical cleanroom injection molding for improving thermal performance and contaminant removal

Theoretical expression for clean air volume in cleanrooms with non-uniform environments

Impact of the Speed of Airflow in a Cleanroom on the Degree of Air Pollution

Regional flow motion and heat energy balance analysis of a 10,000 class pharmaceutical cleanroom with secondary return air conditioning system

Numerical Analysis on Performance of Different Ceiling Coverage of fan Filter Units in Semiconductor Fabs

An Integrated Experimental and CFD Analysis of Ceiling-Fan-Integrated Air Conditioning System: Indoor Air Quality and Air Velocity

Control Strategy of Fan Filter Units Based on Personnel Position in Semiconductor Fabs

Measurement and Optimization on the Energy Consumption of Fans in Semiconductor Cleanrooms

Research on models for estimating aerodynamic and energy consumption performance of fan filter units (FFUs)

Modeling the performance of air filters for cleanrooms using lattice Boltzmann method

Performance Analysis and Improvement of Air Filtration and Ventilation Process in Semiconductor Clean Air-Conditioning System