Application of FFU Ventilating Mode in Purifying Air-Conditioning System

Xiaoxi Wang

2005-01-01

Abstract:The paper introduced the application of FFU in a clean air conditioning system for semiconductor manufacture item,which was compared with the mode of central air supply,finally some advantages and disadvantages had been analyzed.

What problem does this paper attempt to address?

Application of Several Points Jet Distribution to the Air Conditioning in Modern Office

俞卫刚,周俊凯,陈国邦,张朝涵

DOI: https://doi.org/10.3969/j.issn.1005-0329.2004.11.019

2004-01-01

Abstract:A new ventilation system is proposed. According to the layout of modern garden offices, which are separated into several zones, a jet distribution is introduced to the separated working zone in order to realize the individual ventilation and the improvement of indoor air quality and comfortableness. The feasibility of this kind of ventilation is verified by analyse and experiment.
Full-scale evaluation of FFU configurations in an optical cleanroom injection molding for improving thermal performance and contaminant removal

Indra Permana,Alya Penta Agharid,Nitesh Singh,Fujen Wang

DOI: https://doi.org/10.1016/j.csite.2024.105076

IF: 6.268

2024-09-05

Case Studies in Thermal Engineering

Abstract:Cleanrooms are critical in the semiconductor industry, particularly for optical fabrication, where even minor contamination can compromise product quality. Effective airflow and uniform airflow distribution help to prevent contaminant accumulation, mitigate temperature variations, and avoid cross-contamination, which is crucial for achieving high-quality results and compliance with industry standards. This study introduces a novel approach to optimizing Fan Filter Unit (FFU) configurations to enhance thermal performance and contaminant removal in cleanroom settings. Integrating field measurements with advanced Computational Fluid Dynamics (CFD) simulations to comprehensively evaluate four distinct FFU designs, from dispersed to centralized configurations, focused on their impact on airflow dynamics, temperature uniformity, and particle concentration. The study identifies a significant advancement in FFU configuration by demonstrating that centralized arrangements (Designs 2 and 4) substantially improve cleanroom performance. Design 4 emerged as the most effective, showcasing a marked improvement in airflow circulation, a 12% reduction in temperature variation, and a 15% decrease in particle concentration compared to conventional designs. This achievement underscores the novel contribution of this study in optimizing FFU configurations to enhance both thermal performance and contaminant control. These findings not only advance the theoretical understanding of FFU design but also provide practical insights for improving cleanroom environments. The study offers a significant step forward in developing efficient cleanroom designs, contributing valuable guidelines for achieving good environmental control in sensitive manufacturing processes.

thermodynamics
Development and Application of Fresh Air Ventilator

Song SHI,Hui-ling DUAN,Jing SUN

DOI: https://doi.org/10.3969/j.issn.1673-7237.2015.10.004

2015-01-01

Abstract:Good ventilation is an effective way to improve indoor air quality, human health can not be separated from the fresh air system, the indoor air quality is improved continuously by the fresh air ventilator with open loop system to provide sufficient fresh air indoors and reduce indoor harmful substances in the air content, with air purification in the very great degree. Fresh air ventilator with energy recovery, fresh air supply and polluted air removing can effectively solve the air pollution, in line with the public requirements on energy and air quality, meets the people’s pursuit of high quality life. The fresh air ventilator will be more and more widely used in our work and life with broad prospects for development.
The development of fan filter unit with flow rate feedback control in a cleanroom

Juhn-Jie Chen,Chao-Ho Lan,Ming-Shan Jeng,Tengfang Xu

DOI: https://doi.org/10.1016/j.buildenv.2006.10.026

IF: 7.093

2007-10-01

Building and Environment

Abstract:A new type of fan filter unit (FFU) systems was developed and evaluated in this study. Capable of controlling the volume airflow rate through a networked feedback control system, the innovative smart FFU systems can supply much more uniform airflow distribution at the exit of the FFUs than common FFUs that are commercially available in the market. The development of the smart FFU was described and the comparisons of exit airflow velocities between the smart FFU and other conventional FFUs were made. The measurements have shown that the velocity uniformity values of the exit airflow of the smart FFUs were less than 5.0% while the conventional FFUs showed the uniformity values in the range of 14.0–28.0%. In addition, the test results in this study demonstrate that smart FFU systems are capable of reaching preset airflow rates relatively quickly, i.e., within 5s, and maintaining the stable airflow supply to the cleanroom.

engineering, environmental,construction & building technology, civil
Performance Analysis and Improvement of Air Filtration and Ventilation Process in Semiconductor Clean Air-Conditioning System

Zhiyao Ma,Bowen Guan,Xiaohua Liu,Tao Zhang

DOI: https://doi.org/10.1016/j.enbuild.2020.110489

IF: 7.201

2020-01-01

Energy and Buildings

Abstract:The air-conditioning system in modern industrial cleanrooms can be very energy intensive due to large air change rates per hour and high airflow resistance. This study focuses on the actual performance and potential improvements of the filtration and ventilation process in cleanrooms. On-site measurements were conducted in three semiconductor cleanrooms to investigate the actual performance of clean air-conditioning systems. The results reveal that the unmatched particle concentrations of outdoor air and return air increase the filtration load. The indoor workshops are often guaranteed excessively, leading to large amount of redundant airflow rates. Both make the actual ventilation system energy intensive. Therefore, a new air filtration and ventilation system in industrial cleanrooms is introduced in this research. The proposed system filters outdoor air and return air separately before mixture and avoids their mixing loss. It indicates that 25.8% to 45.0% of the total energy can be reduced due to lower airflow resistance. Proper return airflow rate of the cleanrooms are proposed to avoid airflow redundancy, and as a result, 32.9% to 50.7% of potential energy can be saved compared with the original system. (C) 2020 Elsevier B.V. All rights reserved.
Control Strategy of Fan Filter Units Based on Personnel Position in Semiconductor Fabs

Jiaan Zhao,Chenjiyu Liang,Huan Wang,Xianting Li,Wei Xu

DOI: https://doi.org/10.1016/j.buildenv.2022.109420

IF: 7.093

2022-01-01

Building and Environment

Abstract:To meet the high environmental requirements of semiconductor manufacturing, fabs operate at a huge air volume that is designed under the most unfavorable condition, resulting in extremely high energy consumption. In this study, a new control strategy of fan filter units (FFUs) based on personnel position was proposed to reduce the operating air volume, i.e., higher air supply velocity around personnel and lower air supply velocity far from the personnel. And then a computational fluid dynamics (CFD) model was established to simulate the particle distribution under different scenarios. The specific supply air velocity of FFUs above the personnel and other areas were determined with the scenario that only one personnel stands in cleanroom. More scenarios with multiple personnel and personnel moving around were used to verify the effectiveness of proposed control strategy. The results show that supply air velocities of 0.35 m/s around personnel and 0.15 m/s and far from the personnel can guarantee the same level of cleanliness as the conventional constant air volume method (i.e., air supply velocity of all FFUs at 0.35 m/s). With the proposed control strategy, the required air volume can be significantly decreased by 42-55.3% under different working conditions. The proposed strategy has the advantage of high energy savings and emission reduction in semiconductor fabs.
Analysis and Experiments on the Characteristics of Airflow and the Air Cleanliness Protection Region under Fan Filter Units in Cleanrooms

Hao Li,Chen Huang,Weiqi Yi,Chao Li

DOI: https://doi.org/10.3390/su151713268

IF: 3.9

2023-09-04

Sustainability

Abstract:Cleanrooms often utilize large amounts of supply air to achieve a required cleanliness level. To reduce the overall supply air volume, critical processes demanding the highest cleanliness requirements are suggested to be placed directly beneath the air outlet of fan filter units (FFUs). In order to determine an appropriate supply air volume, it is necessary to quantitatively analyze the particulate concentration distribution downstream of FFUs with various characteristics to determine an adequate but not excessive supply air volume. Three FFU sizes and four supply air velocities were used in this experiment, and the resulting airstream velocities, jet diffusion widths, and characteristics of particulate concentration distribution were obtained. Fitting expressions were statistically acquired based on the respective experimental data sets, which can be used to predict the airflow velocity value at any point in an FFU flow region and the width of the air cleanliness protection range.

environmental sciences,environmental studies,green & sustainable science & technology
Measurement and Optimization on the Energy Consumption of Fans in Semiconductor Cleanrooms

Zhiyao Ma,Xiaohua Liu,Tao Zhang

DOI: https://doi.org/10.1016/j.buildenv.2021.107842

IF: 7.093

2021-01-01

Building and Environment

Abstract:The semiconductor cleanrooms consume lots of fan power energy for the demand of indoor thermal and cleanliness environment. Therefore, this study focuses on the performance of the ventilation system in semiconductor cleanrooms and its relationship with the heating/cooling process, filtration process, and indoor cleanliness conditions. On-site measurements were conducted in four semiconductor cleanrooms to investigate the factors that affect the ventilation power consumption. The results indicate that the pressure drop of the makeup unit (MAU) system often exceeds 1000 Pa, and the cooling, heating and humidification coils account for 31.0%-41.9% of the resistance. Large airflow rates are the main factor that leads to high energy consumption of the fan filter unit (FFU) system. Therefore, optimization approaches of the ventilation system are proposed to investigate the energy saving potentials. The arrangement of the coils is improved by combing some coils together depending on the outdoor air-treatment process, and the pressure drop in the MAU system reduces by 10.7%-17.2%. The reduction of the return airflow rate is also discussed in the research and it shows significant energy saving potentials of the FFU system.
Experimental Investigation of Particle Dispersion in Cleanrooms of Electronic Industry under Different Area Ratios and Speeds of Fan Filter Units

Xiaoliang Shao,Shukui Liang,Jiaan Zhao,Huan Wang,Huifang Fan,Hui Zhang,Guanpeng Cao,Xianting Li

DOI: https://doi.org/10.1016/j.jobe.2021.102590

IF: 7.144

2021-01-01

Journal of Building Engineering

Abstract:Ventilation and air distribution systems for cleanrooms in electronic industry have been overdesigned. Reducing the air supply volume of fan filter units (FFUs) is considered an energy saving measure. However, little is known about the particle removal performances after reduction in air supply volume. In this study, experiments were conducted in a chamber to investigate the effects of reducing air supply volume on the characteristic of particle distribution. The experiments were based on three FFU speed ratios (80%, 50%, and 40%) and four particle source locations (source in the subzone with and without an FFU at the heights of 1.5 m and 1.0 m) at two FFU area ratios (50% and 25%). The results were analyzed using the dimensionless particle concentrations (with respect to ideal mixing condition) in sixteen subzones within the experimental region. It was concluded that (1) the containment effect of air distribution on particle lateral dispersion was weakened with the decrease of air supply volume for FFU area ratios of both 50% and 25%; (2) most subzones have been well protected at an FFU area ratio of 50% (with dimensionless concentrations far below 0.2) regardless of the source location, and at an FFU area ratio of 25% (with dimensionless concentrations far below 0.5) for the particle source under an FFU supply airflow. However, the containment effect has been poor at an FFU area ratio of 25% for the particle source not under an FFU supply airflow regardless of the air supply volume; (3) the working face at a height of 1.0 m was slightly more affected for a source height of 1.5 m compared with a source height of 1.0 m at an FFU area ratio of 50%, while there was no significant difference in the particle removal for both source heights at an FFU area ratio of 25%; and (4) the air supply volume could be reduced by 46.7% (0.2 as the critical value) and 43.8% (0.5 as the critical value), respectively for FFU area ratios of 50% and 25% from the perspective of air distribution effectiveness. This study improves the understanding of characteristics of reduced airflow in cleanrooms.
Performance and Improvement of Cleanroom Environment Control System Related to Cold-Heat Offset in Clean Semiconductor Fabs

Jiawen Yin,Xiaohua Liu,Bowen Guan,Tao Zhang

DOI: https://doi.org/10.1016/j.enbuild.2020.110294

IF: 7.201

2020-01-01

Energy and Buildings

Abstract:Clean room is a key technology to guarantee the normal operation in semiconductor manufacturing industry. On-site measurement of indoor environment and performances of the air conditioning systems in four clean semiconductor fabs have been conducted in summer in this study. It's indicated that indoor environment of these four fabs all meet the requirement and a satisfied control accuracy is achieved. The main energy-consuming facilities in the air conditioning system arises from the fan of air handling processors and chillers, which consumes about 80%-90% of the total. Reheating in make-up air handing process (MAU) occurs in the current system, resulting in cold-heat offset and extra energy loss. System schematic avoiding reheating based on the measured results is proposed. The proposed system where only part of indoor return air is cooled by the dry cooling coil (DCC) and achieves secondary return air could avoid the cold-heat offset. At full load condition, cooling supplies for DCC (Q(DCC)) in the proposed system is about 40%-52% lower than that in the current system of these four fabs. No reheating exists in the proposed system, and QRH is saved 151-236 W/m(2). The research helps to reveal the operating performance and propose appropriate improving approaches for these circumstances. (C) 2020 Elsevier B.V. All rights reserved.
Capturing Energy-Saving Opportunities in Air-Supply System for Cleanroom with Non-Unidirectional Airflow

Y. Wang

DOI: https://doi.org/10.4028/WWW.SCIENTIFIC.NET/AMR.953-954.1488

2014-06-01

Abstract:In order to improve design method and optimize control strategy used in non-unidirectional airflow cleanroom, the influence of airflow organization and supply air volume on characterization of mini-environments in a non-unidirectional cleanroom was studied in the paper. A series of investigations were conducted on a cleanroom experimental platform with different airflow organization modes and supply air volume variation by electronic frequency conversion (35 to50Hz, 5Hz interval) on air-supply fan unit. The characterization such as cleanliness , pressure difference between clean zone and outdoor were measured during these experiments. It is shown that radiation air-supply airflow organization can offer higher cleanliness when compared with traditional ceiling-supply and wall-return airflow for non-unidirectional airflow cleanroom without increase power consumption. Taking variable electronic frequency on air-supply fan unit is efficient measure for energy-saving in cleanroom operation.

Environmental Science,Engineering
Implementation of Demand-Oriented Ventilation with Adjustable Fan Network

Huan Wang,Guijin Wang,Xianting Li

DOI: https://doi.org/10.1177/1420326x19897114

2020-01-01

Abstract:Airflow patterns are essential for heating, ventilation and air conditioning (HVAC) systems. Traditional HVAC systems are predesigned and operated using a fixed airflow pattern. However, the indoor occupancy and heat source always vary and therefore, the fixed flow pattern cannot efficiently maintain the required indoor environment conditions. In this study, a novel Adjustable Fan Network (AFN) for improving airflow pattern manoeuvrability is proposed. It integrates multiple small and adjustable axial fans into an AFN, enabling it to change the airflow pattern based on the actual demand with only one set of equipment. Further, the outflow characteristics of two types of axial fans were measured using a quad-view colour sequence particle streak velocimetry (CSPSV) in a test chamber. The ventilation system was then designed based on typical scenarios. Finally, the performance of the AFN was evaluated under different scenarios using a quad-view CSPSV. Based on the results, it was evident that the AFN can provide a better direct supply of air to the occupied zone under different scenarios. With the growing demand for personal thermal comfort and energy-saving in HVAC systems, the novel AFN system has a great potential to be a highly controllable terminal for demand-oriented ventilation.
A new ventilation mode of air conditioning in subway vehicles and its air distribution performance

Zhiyuan Chang,Ke Yi,Weiwei Liu

DOI: https://doi.org/10.1016/j.enbenv.2020.06.005

2021-01-01

Energy and Built Environment

Abstract:A new air supply mode of subway vehicles is proposed.An index to evaluate the degree of air short circuit is proposed.Energy utilization efficiency of new mode is higher than traditional mode.New mode with more uniform air distribution and better thermal comfort.The traditional ventilation mode of subway vehicles adopts the form that the inlets and outlets are placed on the upper part of the cabin. The air distribution formed in this mode often cause serious problems of thermal comfort and energy consumption. In order to solve these problems caused by the traditional ventilation mode, a new hybrid ventilation mode was proposed. The hybrid ventilation mode uses both upper and underside air supply inlets. A method for evaluating the air distribution performance of subway air conditioning was developed. The method applies non-uniformity coefficients, maximum temperature difference, air diffusion performance index, modified energy utilization coefficient and Air short-circuit comprehensive coefficient. Air short-circuit comprehensive coefficient was a new index to evaluate the degree of air short-circuit of supply air. Based on the airflow simulation, the air distribution performance for the hybrid ventilation mode was evaluated using these indexes, and compared with the traditional ventilation mode. The results show that compared with the traditional ventilation mode, the hybrid ventilation mode has more uniform temperature distribution, better thermal comfort, higher energy utilization efficiency and lower degree of air short-circuit of supply air.
Application of microchannel heat exchangers in resident air conditioners

Zhang Huiyong,Li Junming,Wang Buxuan

DOI: https://doi.org/10.3969/j.issn.1002-8501.2009.09.018

2009-01-01

Abstract:Based on the analysis on the lasted research achievements for the application of microchannel heat exchangers,in particular the microchannel louver heat exchangers in resident air conditioners at home and abroad,discusses the advantages and problems need to be solved,and points out the direction of further research.
Application of temperature and humidity independent control air conditioning system in hospital buildings

Liu Shuanqiang,Liu Xiaohua,Jiang Yi

DOI: https://doi.org/10.3969/j.issn.1002-8501.2009.04.018

2009-01-01

Abstract:Analyses the core concept and features of the temperature and humidity independent control air conditioning system.Presents the application mode of this system in the clean area and comfort area of hospitals.The result of energy consumption comparison shows that when this system is used in the clean area of hospitals,more than 35% of the energy consumption can be reduced compared with the conventional clean air conditioning system,and when this system is used in the comfort area,more than 25% of the air conditioning energy consumption can be reduced.
Indoor Airflow and Pollutant Spread Inside the Cleanroom with Micro-Porous Supplying Panel and Different Ventilation Schemes: Analytical, Numerical and Experimental Investigations

Fu-Yun Zhao,Jin Cheng,Bao Liu,Zhi-Rong Huang,Xianting Li

DOI: https://doi.org/10.1016/j.jobe.2020.101405

IF: 7.144

2020-01-01

Journal of Building Engineering

Abstract:The airflow distribution and human thermal comfort at different supply airflow rates, as well as cleanliness recovery characteristic of indoor pollutant were numerically and theoretically investigated in a Class 10, 000 cleanroom. Computational fluid dynamics models of the cleanroom with three ventilation schemes, where the position of the micro-porous air supplying panel was altered to create unidirectional low-turbulence flow, were built and validated by the on-site measurements that carried out in a full scale test room. The results of theoretical analysis of cleanliness recovery characteristic were compared with numerical ones, to identify whether the decay equation could accurately predict the cleanliness recovery characteristic of different ventilation schemes. It was found that air distribution was generally uniform, and a small temperature gradient was still observed. Air change rate (ACH) played an important role in the indoor airflow field, and particularly it has a distinct effect on the deflection and the distribution of thermal plume (e.g. in the scheme of lateral ventilation). For large ACH, removal of pollutant (e.g. in the scheme of combined ventilation) could be enhanced, whereas there was a risk of thermal discomfort (e.g. in the scheme of vertical ventilation). Furthermore, decay equation was demonstrated that it was not suitable for all ventilation for predicting the cleanliness recovery time. Present work certainly adds to our understanding of the micro-porous panel ventilation in cleanrooms. Present investigation has a number of important implications for future cleanroom practice.
Purifier or Fresh Air Unit? A Study on Indoor Particulate Matter Purification Strategies for Buildings with Split Air-Conditioners

Yuchen Shi,Xiaofeng Li

DOI: https://doi.org/10.1016/j.buildenv.2017.12.033

IF: 7.093

2018-01-01

Building and Environment

Abstract:Buildings with split air-conditioners (referred to as SAC buildings) are not equipped with mechanical ventilation systems. The fresh air supply in these buildings primarily relies on natural ventilation and air infiltration, both of which can introduce outdoor particulate matter (PM) pollutants into the indoor environment. To simultaneously satisfy fresh air and indoor PM concentration requirements, two indoor air purification strategies can be employed, including air purifiers (APs) combined with open-window ventilation (AP-Mode) and fresh air units (FAUs) combined with positive pressure control (FAU-Mode). Accordingly, an investigation is required in order to determine which of the two strategies is more suitable for various types of SAC buildings. In this study, firstly, a new method for calculating the mechanical fresh air supply rate needed to maintain a positive room pressure is proposed for SAC buildings. It is concluded that positive room pressure can be maintained if the mechanical fresh air supply rate is more than 3.2 times the natural air infiltration rate (i.e., air infiltration rate when a room is not supplied with mechanical fresh air). Then, based on the mass balance principle of indoor particulate matter, the clean air delivery rates (CADRs) are calculated for APs used in the AP-Mode and FAUs used in the FAU-Mode under different PM2.5 I/O ratios and fresh air supply rates, and the annual energy consumptions of the two strategies are compared. Consequently, it is determined that in most cases, the FAU-Mode has a lower annual energy consumption when used in SAC buildings in Beijing, Shanghai, and Guangzhou. Finally, considering the room airtightness requirement for positive pressure control and the indoor PM2.5 concentration upper limit of 35 mu g/m(3), the AP-Mode should be used in rooms with fresh air requirements lower than 1 h(-1), whereas the FAU-Mode should be used in other cases.
An intelligent FFR with a self-adjustable ventilation fan

Song Zhou,Hui Li,Shengnan Shen,Siyu Li,Wei Wang,Xiaotie Zhang,James Yang

DOI: https://doi.org/10.1080/15459624.2017.1366036

2017-10-17

Journal of Occupational and Environmental Hygiene

Abstract:This article presents an intelligent Filtering Facepiece Respirator (FFR) with a self-adjustable ventilation fan for improved comfort. The ventilation fan with an intelligent control aims to reduce temperature, relative humidity, and CO<sub>2</sub> concentrations inside the facepiece. Compared with a previous version of the FFR, the advantage of this new FFR is the intelligent control of the fan's rotation speed based on the change in temperature and relative humidity in the FFR dead space. The design of the control system utilizes an 8-bit, ultra-low power STC15W404AS microcontroller (HongJin technology, Shenzhen, China), and adopts a high-precision AM2320 device (AoSong electronic, Guangzhou, China) as temperature and relative humidity sensor so that control of temperature and relative humidity is realized in real time within the FFR dead space. The ventilation fan is intelligently driven and runs on a rechargeable lithium battery with a power-save mode that provides a correspondingly longer operational time. Meanwhile, the design is simplistic. Two experiments were performed to determine the best location to place the fan.

environmental sciences,public, environmental & occupational health
Numerical Analysis on Performance of Different Ceiling Coverage of fan Filter Units in Semiconductor Fabs

Jiaan Zhao,Xianting Li,Wei Xu

DOI: https://doi.org/10.1051/e3sconf/202235605060

2022-01-01

E3S Web of Conferences

Abstract:In practical semiconductor fabs engineering, in order to reduce the investment cost, low coverage rate of FFUs is usually adopted and the air supply velocity is high, which brings high resistance to the filter mounted at FFU’s outlet. If a higher ceiling coverage and lower air velocity speed are used, the resistance may be significantly reduced and remarkable energy saving benefits can be obtained. In this study, CFD technology was adopted to simulate airflow in a semiconductor fab and air circulation resistance was obtained by theoretical calculation. Four ceiling coverage of FFUs, 25%, 50%, 75%, 100%, were studied under the condition of same air volume. The particle concentrations and payback period were analysed. The results show that (1) with the increase of the coverage rate, the concentration in most areas decreases significantly while only a small increase in the local area around occupant, and the particle concentration still meets the requirement; (2) adopting high coverage rate for transformation, the initial investment of FFUs increases slightly and the operating cost decreases significantly, and the payback period is only 1.1-2.3 years when 25% coverage rate is transformed into 37.5% - 75%.
HVAC design for Experimental Animal Center of Zhejiang University

Ding De,Yang Yi,Cao Zhigang,Ye Yu

2013-01-01

Abstract:The clean air conditioning system for barrier environment of experimental animal centers has its own features compared to other clean air conditioning systems.Presents the indoor environment parameters of the project,analyses its load features and air volume calculation,and expounds the clean air conditioning system design principles and configuration for barrier environment.Concludes the control strategies and some practical problems during operation.

Application of FFU Ventilating Mode in Purifying Air-Conditioning System

Application of Several Points Jet Distribution to the Air Conditioning in Modern Office

Full-scale evaluation of FFU configurations in an optical cleanroom injection molding for improving thermal performance and contaminant removal

Development and Application of Fresh Air Ventilator

The development of fan filter unit with flow rate feedback control in a cleanroom

Performance Analysis and Improvement of Air Filtration and Ventilation Process in Semiconductor Clean Air-Conditioning System

Control Strategy of Fan Filter Units Based on Personnel Position in Semiconductor Fabs

Analysis and Experiments on the Characteristics of Airflow and the Air Cleanliness Protection Region under Fan Filter Units in Cleanrooms

Measurement and Optimization on the Energy Consumption of Fans in Semiconductor Cleanrooms

Experimental Investigation of Particle Dispersion in Cleanrooms of Electronic Industry under Different Area Ratios and Speeds of Fan Filter Units

Performance and Improvement of Cleanroom Environment Control System Related to Cold-Heat Offset in Clean Semiconductor Fabs

Capturing Energy-Saving Opportunities in Air-Supply System for Cleanroom with Non-Unidirectional Airflow

Implementation of Demand-Oriented Ventilation with Adjustable Fan Network

A new ventilation mode of air conditioning in subway vehicles and its air distribution performance

Application of microchannel heat exchangers in resident air conditioners

Application of temperature and humidity independent control air conditioning system in hospital buildings

Indoor Airflow and Pollutant Spread Inside the Cleanroom with Micro-Porous Supplying Panel and Different Ventilation Schemes: Analytical, Numerical and Experimental Investigations

Purifier or Fresh Air Unit? A Study on Indoor Particulate Matter Purification Strategies for Buildings with Split Air-Conditioners

An intelligent FFR with a self-adjustable ventilation fan

Numerical Analysis on Performance of Different Ceiling Coverage of fan Filter Units in Semiconductor Fabs

HVAC design for Experimental Animal Center of Zhejiang University