Control Strategy of Fan Filter Units Based on Personnel Position in Semiconductor Fabs

Jiaan Zhao,Chenjiyu Liang,Huan Wang,Xianting Li,Wei Xu

DOI: https://doi.org/10.1016/j.buildenv.2022.109420

IF: 7.093

2022-01-01

Building and Environment

Abstract:To meet the high environmental requirements of semiconductor manufacturing, fabs operate at a huge air volume that is designed under the most unfavorable condition, resulting in extremely high energy consumption. In this study, a new control strategy of fan filter units (FFUs) based on personnel position was proposed to reduce the operating air volume, i.e., higher air supply velocity around personnel and lower air supply velocity far from the personnel. And then a computational fluid dynamics (CFD) model was established to simulate the particle distribution under different scenarios. The specific supply air velocity of FFUs above the personnel and other areas were determined with the scenario that only one personnel stands in cleanroom. More scenarios with multiple personnel and personnel moving around were used to verify the effectiveness of proposed control strategy. The results show that supply air velocities of 0.35 m/s around personnel and 0.15 m/s and far from the personnel can guarantee the same level of cleanliness as the conventional constant air volume method (i.e., air supply velocity of all FFUs at 0.35 m/s). With the proposed control strategy, the required air volume can be significantly decreased by 42-55.3% under different working conditions. The proposed strategy has the advantage of high energy savings and emission reduction in semiconductor fabs.