Abstract:Precise fabrication of semiconducting channel materials into densely-aligned uniformly parallel arrays is one prerequisite to the high-performance ultra-scaled technology nodes, in particular for carbon nanotubes (CNTs). Traditional thin-film-based approaches generally yield CNTs in irregularly-spaced bundles or with wide orientation distribution, and lack a mechanism to effectively eliminate mis-aligned CNTs from the ultra-scaled channel area. Therefore, the averaged pitch value and precision of CNT arrays, the key parameters defining lateral CNT spacing, fail to simultaneously meet all of the patterning requirements for the ultra-scaled technology nodes. Bio-fabrication is promising for patterning CNTls at a resolution beyond the existing lithographic limit. However, impacted by surface charges and sub-micron dimensions of typical bio-templates, current bio-templated electronics exhibit both poor transport performance and array uniformity smaller than 1 micron. We report precise scaling of inter-CNT pitch using a supramolecular assembly method called Spatially Hindered Integration of Nanowire Electronics (SHINE). Specifically, by using nano-trenches to align CNTs and DNA hybridization to stabilize them in place, we constructed parallel CNT arrays with uniform pitch as small as 10.4 nm, at an assembly yield over 95%. The pitch precision improves on that prepared from conventional thin-film approaches by more than two orders of magnitude. Compared to the lithography-patterned Si channels at 10 nm technology node, SHINE simultaneously provides both 70% smaller averaged pitch value and molecular-scale pitch precision in the channel area. By engineering the interfacial compositions, metal ions and surface charges that are destructive to FET performance have been excluded from the channel area without degrading CNT alignment. Under a source-to-drain voltage of -0.5 V, we demonstrate both transconductance more than 0.6 mS/μm with fast on/off switching. And the key FET performance metrics are improved by more than one order of magnitude than previous bio-templated FETs. Furthermore, we demonstrate centimeter-scale alignment of fixed-width CNT arrays. At the interface of high-performance electronics and bio-molecular self-assembly, precise bio-fabrication could provide ultra-scaled devices or circuits compatible with or sensitive to local biological environments.

Assembly and Alignment of High Packing Density Carbon Nanotube Arrays Using Lithographically Defined Microscopic Water Features

Length-dependent Alignment of Large-Area Semiconducting Carbon Nanotubes Self-Assembly on a Liquid-Liquid Interface

Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics

Langmuir blodgett assembly of densely aligned single walled carbon nanotubes from bulk materials

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

Ultra-high density alignment of carbon nanotubes array by dielectrophoresis

Wafer-scale Monodomain Films of Spontaneously Aligned Single-Walled Carbon Nanotubes

Dielectrophoretic Assembly of Carbon Nanotube Chains in Aqueous Solution

Preparation of Horizontal Single-Walled Carbon Nanotubes Arrays

Soft-lock drawing of super-aligned carbon nanotube bundles for nanometre electrical contacts

CNT array-induced nanobubble assembly, nanodisk fabrication and enhanced spectral detection of CNT bundle density

Top-Down Patterning and Self-Assembly for Regular Arrays of Semiconducting Single-Walled Carbon Nanotubes

Growth Of High-Density-Aligned And Semiconducting-Enriched Single-Walled Carbon Nanotubes: Decoupling The Conflict Between Density And Selectivity

Realizing Controllable Carbon Nanotube Arrays for Soft Devices by Asymmetric Langmuir–Blodgett and Hydrophilization Process

Asymmetric Langmuir-Blodgett and Hydrophilization Process to Realize Density-Controllable Carbon Nanotube Array on Flexible and Stretchable Substrates

The Fabrication of Macroscopical Long Aligned Carbon Nanotube Arrays

Electric-field-enhanced assembly of single-walled carbon nanotubes on a solid surface.

Small Molecule Additives to Suppress Bundling in Dimensional‐Limited Self‐Alignment Method for High‐Density Aligned Carbon Nanotube Array

Large area patterned arrays of aligned carbon nanotubes via laser trimming

Diameter‐Selective Density Enhancement of Horizontally Aligned Single‐Walled Carbon Nanotube Arrays by Temperature‐Mediated Method

(Invited) DNA-Directed High-Precision Assembly of CNT FETs