Study of a New Hydrogen Sensor Based on the Synthesis of a Sputtered In–Sn–Zn-O Thin Film and Evaporated Palladium Nanoparticles

Pao-Chi Yao,Chi-Kang Kuo,Jung-Chuan Wang,Pai-Yi Chu,Wei-Chou Hsu,Wen-Chau Liu
DOI: https://doi.org/10.1109/ted.2024.3361844
IF: 3.1
2024-01-01
IEEE Transactions on Electron Devices
Abstract:A new and interesting hydrogen (H $_{\text{2}}$ ) gas sensor based on an In–Sn–Zn-O (ITZO) thin film modified with palladium nanoparticles (Pd NPs) on a sapphire (Al $_{\text{2}}$ O $_{\text{3}}$ ) substrate is manufactured and investigated herein. High-resolution scanning electron microscopy (HRSEM), energy-dispersive X-ray spectroscopy (EDS), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS) are employed to study intrinsic material properties. Experimentally, under 1% H $_{\text{2}}$ /air gas, the fabricated Pd NP/ITZO sensor exhibits prominent sensing performance, including a higher sensing response S $_{\text{R}}$ of 12 890 with a response (recovery) time of 106 s (13 s), and a lower detectable content of 1 ppm H $_{\text{2}}$ /air at 225 $^{\circ}$ C is obtained. Moreover, the sensor shows high reproducibility, excellent selectivity, and long-term stability (91 days) toward H $_{\text{2}}$ gas.
engineering, electrical & electronic,physics, applied
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