Study of a palladium nanoparticle/ In-Zn-O thin film-based hydrogen gas sensor

Chao-Chun Chiu,Chi-Kang Kuo,Pai-Yi Chu,Dong-Her Shih,Wen-Chau Liu
DOI: https://doi.org/10.1016/j.snb.2024.136015
IF: 9.221
2024-05-23
Sensors and Actuators B Chemical
Abstract:A comprehensive study on the hydrogen (H 2 ) gas sensing performance of a novel chemoresistive gas sensor is presented in this work. This sensor is synthesized by an In-Zn-O (IZO) thin film and palladium nanoparticles (Pd NPs) on a sapphire (Al 2 O 3 ) substrate. The relevant elemental, compositional, and chemical state properties are systematically investigated for the fabricated Pd NP/IZO sensor. The use of Pd NPs effectively enhances the surface area to volume (S A /V) ratio and related catalytic capability. This significantly improves the hydrogen sensing characteristics. In the experiment, the produced sensor achieves a higher sensing response S R of 1.59 × 10 4 under 1% H 2 /air gas and a lower detectable content of 100 ppb H 2 /air at 250°C. Importantly, the fabricated sensor reveals promised selectivity, reproducibility, and long-term (90 days) durability towards H 2 gas. Therefore, the studied sensor offers a prominent choice for H 2 gas detection.
chemistry, analytical,electrochemistry,instruments & instrumentation
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