Recycling of Spent Indium–Gallium–Zinc Oxide Based on Molten Salt Electrolysis

Shaolong Li,Yang Liu,Yusi Che,Jianxun Song,Yongchun Shu,Jilin He,Baoqiang Xu,Bin Yang

DOI: https://doi.org/10.1021/acssuschemeng.0c05986

2020-10-22

Abstract:A facile electrochemical method was used for the first-time recovery of an In–Ga–Zn alloy from a spent indium–gallium–zinc oxide (IGZO). In this work, the molar ratio of In, Ga, and Zn in the alloy is almost the same as that in the initial IGZO after it was electrochemically recovered. For the process, a graphite crucible was used as the cathode to collect the electrolytic products since liquid gallium can be infiltrated into almost all metals to form alloys. The oxygen and carbon contents were only 220 and 130 ppm, respectively, and the yield can reach 98 wt %. The process was simple, efficient, and sustainable and can be extended to large-scale production. Moreover, the obtained alloy was used as raw material for the preparation of oxide composite powders by a coprecipitation method, which can be utilized for preparing the IGZO target. The size of the powder was between 40 and 50 nm, and the distribution of each element was uniform. This article offers a reference for the electrodeoxidation of all gallium-containing oxides. Meanwhile, it also provides a concept for electrolytically recovered alloys directly used as raw materials for the preparation of IGZO.This article has not yet been cited by other publications.

chemistry, multidisciplinary,engineering, chemical,green & sustainable science & technology

What problem does this paper attempt to address?

The paper primarily addresses a new solution for the recycling of discarded Indium-Gallium-Zinc Oxide (IGZO) materials. IGZO, as a high-performance semiconductor material, is widely used in thin-film transistors, especially in electronic and optoelectronic devices. However, the reserves of the key metals indium and gallium in the Earth's crust are low, and their extraction process is complex. Additionally, a large amount of discarded IGZO material containing low impurities is generated during the sputtering process. Therefore, developing sustainable recycling methods is of great significance.

The paper introduces a method for recycling indium, gallium, and zinc from IGZO based on molten salt electrolysis. Through electrochemical reduction in a calcium chloride molten salt system at 850°C, indium-gallium-zinc alloy was successfully recovered from discarded IGZO for the first time. This method is simple, efficient, and highly sustainable, and it can be scaled up for large-scale production.

Specifically, the study used a graphite crucible as the cathode to collect the electrolysis products, avoiding the infiltration of liquid gallium into other metals to form alloys. The experimental results show that the proportion of the three metals in the recovered indium-gallium-zinc alloy is similar to that in the original IGZO material, with very low oxygen and carbon content (220 ppm and 130 ppm, respectively), and a recovery rate of up to 98 wt%. Moreover, the obtained alloy can be directly used to prepare oxide composite powders, which can further be used for the preparation of IGZO targets without additional purification steps.

In summary, the recycling method proposed in this paper provides a new approach and technical pathway for the sustainable utilization of discarded IGZO materials.