Abstract:This work considers the resulting material structural effects of laser-processing chemical vapor deposited (CVD) diamond. The utilized 532 nm wavelength laser had a pulse duration of 40 ns together with a spot diameter of ca. 40 μm. The effect of cutting fluence on the CVD diamond microstructure was investigated using both Raman and transmission electron microscopy (TEM) analyses. While Raman analysis showed that increasing the laser fluence led to a transition from diamond to graphite, the spread of the beam and consequent interrogation volume leads to limitations in understanding the precise structure over the ablated diamond surface. As such, TEM showed that at a low fluence (4.9 J/cm2), the subsurface microstructure is a mix of both graphite and amorphous carbon (aC). At 15 J/cm2, only the graphite phase was identified. As the fluence increases further, the thickness of the graphite layer decreases until it disappears at a fluence of 50 J/cm2. In contrast, a crystalline diamond phase began to be identified at 15 J/cm2 and grows with increasing fluence. Moreover, cracks were visible only until a fluence of 15 J/cm2, while at higher fluences, no cracks were observed. A simulation model was developed to predict the residual graphitization thickness formed in CVD diamond by a laser beam. Despite some differences in the graphite layer thickness, the results obtained from the model were consistent with the TEM results, supporting the findings of this study. Finally, cracks were only located in the graphite phase at the two lowest laser fluences. This was due to the low fracture toughness of graphite as compared to diamond.

Defect-assisted optical breakdown in synthetic diamonds irradiated by IR femtosecond pulses

Laser Imaging of Small-Scale Structural Inhomogeneities in CVD Diamond

Intrapulse in situ Raman probing of electron, phonon and structural dynamics in synthetic diamond excited by ultrashort laser pulses: Insights into atomistic structural damage

Radiation Damage Effects on Optical, Electrical, and Thermophysical Properties of CVD Diamond Films

Optical Defects and Their Depth Penetration in 200 Kev Electron Irradiated IIa Diamond

Laser damage testing of CVD-grown diamond windows

Nanosecond pulsed laser-processing of CVD diamond

Charge transfer effects, thermo- and photochromism in single crystal CVD synthetic diamond

Two-hole "desorption" mechanism of interstitial-vacancy pair generation visualized by avalanche-like color-center yield in synthetic diamond under ultrashort-pulse laser exposure

Probing the Nanostructure of Neutron-Irradiated Diamond Using Raman Spectroscopy

Optically Triggered Schottky Barrier Diodes in Single Crystal Diamond

Optical Breakdown For Silica And Silicon With Double Femtosecond Laser Pulses

Optical Breakdown of InGaAsP/InP Based Multiquantum Well Optical Attenuators

Raman Study of the Diamond to Graphite Transition Induced by the Single Femtosecond Laser Pulse on the (111) Face

Multistep transition of diamond to warm dense matter state revealed by femtosecond X-ray diffraction

Influence of Surface Cracks on Laser-Induced Damage Resistance of Brittle Kh2po4 Crystal

Ablation Threshold Measurement and Chemical Modification of UV Nanosecond Laser Micromachining of Polycrystalline Diamond

Surface Texturing of CVD Diamond Assisted by Ultrashort Laser Pulses

The Annealing Kinetics of Defects in CVD Diamond Irradiated by Xe Ions

Ultrashort pulse laser ablation of dielectrics: Thresholds, mechanisms, role of breakdown

Laser damage evolution by defects on diamond fly-cutting KDP surfaces