Abstract:A linear, tunable, and self-compensating phase shifter based on liquid metal (LM) is proposed in this article using a half-mode substrate-integrated waveguide (HMSIW). The key phase shifting element is a via-pad-slot (VPS) structure where a thru via is attached to a pad surrounded by an annular slot. This is equivalent to a shunt capacitance and inductance loaded on the HMSIW. Phase shift is achieved when the annular slot is covered by the LM that runs in microfluidic channels on the surface of the HMSIW. This allows easy implementation and convenient manipulation of the LM without incurring excessive losses. A self-compensation structure, based on multiple rows of VPSs, is proposed to achieve a low phase deviation with frequency (low dispersion). The design method to ensure a linear and small phase step over a large phase range is presented. Two phase shifters have been designed and experimentally verified. Phase shifter-I, with two VPS rows, provides a phase shift from 0 $^{circ}$ to 41 $^{circ}$ with $pm$ 1 $^{circ}$ phase deviation with frequency over 9.5–12.5 GHz. The average phase resolution is 1 $^{circ}$ . The measured insertion loss (IL) is 0.8 $pm$ 0.1 dB, with a figure of merit of 45.6 $^{circ}$ /dB. Phase shifter-II uses three VPS rows to provide a phase shift from 0 $^{circ}$ to 180 $^{circ}$ with a phase resolution of 1.68 $^{circ}$ . The achieved phase deviation with frequency is within $pm$ 2 $^{circ}mathbf{}$ over 10–12.5 GHz and within $pm$ 5 $^{circ}$ over 9–13 GHz. The measured IL is 1.1 $pm$ 0.1 dB with a competitively high figure of merit of 163.6 $^{circ}$ /dB. Unlike many other phase shifters, the loss of the proposed phase shifters does not increase with the phase shift. The measurements are in very good agreement with the circuit analysis and simulations. The proposed linear phase shifter has demonstrated high performance and very attractive features such as low IL that does not strongly depend on the phase shift, linear phase change, high phase resolution, and low phase dispersion with frequency. Compared with other LM-enabled phase shifters, it has the advantage of easy implementation and control. This LM-based phase shifter also potentially has high power handling capability.

10-GHz Low-Loss Liquid Metal SIW Phase Shifter for Phased Array Antennas

Reconfigurable Liquid Metal-Based SIW Phase Shifter

Phase Reconfiguration Via SIW Structures Filled with Liquid Metal

Liquid Metal-Based Tunable Linear Phase Shifters With Low Insertion Loss, High Phase Resolution, and Low Dispersion

An 18 similar to 30 GHz Vector-Sum Phase Shifter With Two-Stage Transformer-Based Hybrid in 130-nm SiGe BiCMOS

An 18~30 GHz Vector-Sum Phase Shifter with Two-Stage Transformer-Based Hybrid in 130-Nm SiGe BiCMOS

29-/35 GHz Dual-band High-Gain Phase Shifter with Hybrid -Networks

Broadband Nonreciprocal Spoof Plasmonic Phase Shifter Based on Transverse Faraday Effects

A Broadband Tunable Multilayer Substrate Integrated Waveguide Phase Shifter

Sub-6 GHz High FOM Liquid Crystal Phase Shifter for Phased Array Antenna

Low-Loss Reconfigurable Phase Shifter in Gap-Waveguide Technology for mm-Wave Applications

Contactless AF-SIW phase shifters based on periodic structures at mmWaves

Synthesis Design of Equal‐length Phase Shifter Based on Substrate Integrated Waveguide and Microstrip Line

A 32-38Ghz Full-360° Low-Phase-Error 6-Bit Passive Phase Shifter in 0.15μm GaAs

Liquid Crystal-Filled 60 GHz Coaxially Structured Phase Shifter Design and Simulation with Enhanced Figure of Merit by Novel Permittivity-Dependent Impedance Matching

A 26-32Ghz 6-Bit Bidirectional Passive Phase Shifter with 14dbm IP1dB and 2.6° RMS Phase Error for Phased Array System in 40nm CMOS

A 4-Bit CMOS Phase Shifter for Millimeter-Wave Phased Arrays

A Digital Siw Phase Shifter Implemented by Switching Transverse Slots Via Pin Diodes

Substrate Integrated Waveguide (Siw) Broadband Compensating Phase Shifter

A 32-40 GHz 7-bit Bi-Directional Phase Shifter With 0.36 dB/1.6 RMS Magnitude/Phase Errors for Phased Array Systems

Broadband Self-Compensating Phase Shifter Combining Delay Line and Equal-Length Unequal-Width Phaser