Abstract:A one-dimensional, hybrid hydrodynamics-Boltzmann model for electron beam (e-beam) generated plasmas in argon at low pressure and a constant magnetic field is developed. The e-beam separates the plasma into two distinct regions: an ionization zone irradiated by the e-beam that creates plasma and reactive species, and a diffusive zone between the e-beam and the chamber wall, where the species diffuse toward the wall. The Boltzmann equation is solved in the ionization zone and the electron energy distribution function is used to calculate rates participating in the species and power balance equations. Comparison of model and experimental data for the radial profiles of the electron density and temperature shows a favorable agreement. All plasma parameters are sensitive to their radial location.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a one - dimensional hybrid hydrodynamic - Boltzmann model for describing the plasma generated by an electron beam in low - pressure argon. Specifically, the research aims to: 1. **Understand plasma region division**: The electron beam divides the plasma into two distinct regions - the ionization region irradiated by the electron beam and the diffusion region located between the electron beam and the cavity wall. The ionization region is mainly responsible for generating the plasma and reactive species, while the diffusion region involves the diffusion of these species towards the cavity wall. 2. **Accurately model the ionization region and the diffusion region**: Calculate the electron energy distribution function (EEDF) in the ionization region by solving the Boltzmann equation, and use this function to calculate the rates involved in the species and power balance equations. For the diffusion region, assume that the electron energy distribution is Maxwellian and calculate the collision rates based on this. 3. **Verify the accuracy of the model**: Compare the radial distributions of electron density and temperature predicted by the model with experimental data to evaluate the effectiveness of the model. The research shows that there is a good agreement between the model and the experimental data, and all plasma parameters are sensitive to their radial positions. 4. **Consider complex physical effects**: The model takes into account the confinement effect of the magnetron electron beam on the background plasma electrons, anisotropic diffusion, and the strong dependence of the electron collision frequency on the Ramsauer effect in argon gas. ### Formula summary - **Electron beam current density**: \[ j_{\text{beam}}(r)=\frac{i_{\text{beam}}}{\pi r_{\text{beam}}^2}\exp\left(-\frac{r}{r_{\text{beam}}}\right) \] - **Boltzmann equation for the electron energy distribution function (EEDF)**: \[ -\frac{d}{du}\left(\frac{2C_{ee}gu(u)}{u^2}\frac{df_0(u)}{du}\right)+\left[\sum_{a = \text{Ar},\text{Ar}^+}\frac{m_e}{M_a}N_a r_{\text{mom}}(u)+3C_{ee}h(u)\right]f_0(u) \] \[ +\frac{1}{6u}\sum_a N_{\text{Ar}}r_{\text{exc}}(u)+r_{\text{ion}}(u)-S_{\text{diff}}^\perp(u)-S_{\text{diff}}^\parallel(u)=\sum_{a=\text{Ar}^+,\text{Ar}^{2+}}R_{\text{beam}}(r = 0)N_e\sqrt{\frac{2e_0}{m_e}}S_a(u)+R_a N_{\text{Ar}}u+U_{\text{exc}}-r_{\text{exc}}(u)+U_{\text{exc}} \] - **Continuity equation**: \[ \frac{1}{r}\frac{\partial}{\partial r}(rC_s)=G_s - L_s \] where \[ C_s=-D_s\frac{\partial N_s}{\partial r}+q_s l_s N_s E \] - **Electron energy balance equation**: \[ \frac{1}{r}\frac{\partial}{\partial r}(rQ_e)=-e_0C_e E+P \] where \[ Q_e=-K_e\frac{\partial T_e}{\partial r}+\frac{5}{2}C_e

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