Abstract:Industrial inductively coupled plasma (ICP) sources are always operated in low gas pressure 10–100 mTorr, therefore in order to accurately investigate the mode transition of ICP, we developed our pure fluid model (2009 J. Appl. Phys. 105 083306) into a hybrid fluid/Monte Carlo (MC) model, where the MC part is exploited to take in more dynamic characteristics of electrons and self-consistently calculate the rate coefficients and electron temperature used in the fluid module, and more crucially to study the electron energy distribution function (EEDF) evolution with mode transition. Due to the introduction of the nonlocal property of the electrons at relatively low pressures, the dependences of the plasma density on the coil current, including the mode transitions, are distinctly different at low and high pressures when simulated by this improved hybrid model (HM), while the trends for different pressures obtained from the original pure fluid model (PFM) are the same in all cases. Furthermore, the computed peaks of the electron density profile by the HM shift from the discharge centre in the E mode to the intense inductive field heating area (about half of the radius of the reaction chamber under the dielectric window) in H mode. In addition, the electron temperature profiles of two modes under different pressures simulated by HM are totally higher than the results of PFM. When the pressure is low, there is a minimum exhibited in the bulk plasma of the electron temperature profiles of the E mode, and along with the mode transition the distribution area of low temperature is substantially reduced. Moreover, this phenomenon disappears when the gas pressure is increased. Accompanied by this, the calculated EEDF of the E mode in the low pressure also demonstrates an absolutely dominant low energy electron fraction (about ⩽5 eV); while transforming to the H discharge most of the electrons carry an energy of 1–10 eV. The tendencies of the calculated EEDF evolution with mode transition under relatively high pressures agree well with the experimental measurements of EEDF of Lee et al (2009 Appl. Phys. Lett. 90 191502), but the determination mechanisms are still in dispute and require further examination.

A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions

Hybrid Model of Radio-Frequency Low-Pressure Inductively Coupled Plasma Discharge with Self-Consistent Electron Energy Distribution and 2D Electric Field Distribution

Benchmarking and Validation of a Hybrid Model for Electropositive and Electronegative Capacitively Coupled Plasmas

Dynamic Investigation of Mode Transition in Inductively Coupled Plasma with a Hybrid Model

Effect of electron Monte Carlo collisions on a hybrid simulation of a low-pressure capacitively coupled plasma

Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method

Comparison Between Experiment and Simulation for Argon Inductively Coupled Plasma

Fluid Model of Inductively Coupled Plasma Etcher Based on Comsol

Self-consistent Modeling of Inductively Coupled Plasma Discharges

Self-Consistent Kinetic Modeling of Low-Pressure Inductively Coupled Radio-Frequency Discharges

Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges

A hybrid method to simulate an inductively coupled Ar-Hg plasma

Geometric Particle-In-Cell discretizations of a plasma hybrid model with kinetic ions and mass-less fluid electrons

Two-Dimensional Simulation of Inductively Coupled Plasma Based on Comsol and Comparison with Experimental Data

A Fluid-Kinetic Hybrid Electron Model for Electromagnetic Simulations

Compensated Monte Carlo Collision Model for Particle-In-Cell Simulation in High-Pressure Plasmas

Two-dimensional Model and Experimental Comparison of an Inductively Coupled Plasma

Hybrid fluid–particle modeling of shock-driven hydrodynamic instabilities in a plasma

A Hybrid Model of Radio Frequency Biased Inductively Coupled Plasma Discharges: Description of Model and Experimental Validation in Argon

Coupling Fluid Plasma and Kinetic Neutral Models using Correlated Monte Carlo Methods