Abstract:Low-noise lasers are of central importance in a wide variety of applications, including high spectral-efficiency coherent communication protocols, distributed fibre sensing, and long distance coherent LiDAR. In addition to low phase noise, frequency agility, that is, the ability to achieve high-bandwidth actuation of the laser frequency, is imperative for triangular chirping in frequency-modulated continuous-wave (FMCW) based ranging or any optical phase locking as routinely used in metrology. While integrated silicon-based lasers have experienced major advances and are now employed on a commercial scale in data centers, integrated lasers with sub-100 Hz-level intrinsic linewidth are based on optical feedback from photonic circuits that lack frequency agility. Here, we demonstrate a wafer-scale-manufacturing-compatible hybrid photonic integrated laser that exhibits ultralow intrinsic linewidth of 25 Hz while offering unsurpassed megahertz actuation bandwidth, with a tuning range larger than 1 GHz. Our approach uses ultralow-loss (1 dB/m) Si$_3$N$_4$ photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise. By utilizing difference drive and apodization of the photonic chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm.

Development of hybrid photonic integrated wavelength-tunable laser at 2 μm and its application to FMCW LiDAR

Hybrid Integrated Ultralow-Linewidth and Fast-Chirped Laser for FMCW LiDAR

Field-widened Michelson Interferometer System As the Spectroscopic Filter of High-Spectral-resolution Lidar

Hybrid Integrated Narrow-Linewidth Semiconductor Lasers

Photonic-electronic integrated circuit-based coherent LiDAR engine

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Highly‐Linear and Wavelength‐Tunable Frequency‐Modulated Continuous‐Wave Hybrid‐Integrated Laser

Fully Integrated Coherent LiDAR in 3D-Integrated Silicon Photonics/65nm CMOS

Frequency agile photonic integrated external cavity laser

Hybrid integrated low noise linearly chirped Frequency Modulated Continuous Wave laser source based on self-injection to external cavity

Development of a 2 μm Solid-State Laser for Lidar in the Past Decade

High-Speed Two-Dimensional Spectral-Scanning Coherent LiDAR System Based on Tunable VCSEL

Ultralow-noise frequency-agile photonic integrated lasers

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Tunable V-Coupled-Cavity Semiconductor Laser Monolithically Integrated with Monitoring Photodiodes Using Deeply Etched Reflective Trenches

Hybrid integrated low-noise linear chirp frequency-modulated continuous-wave laser source based on self-injection to an external cavity

Silicon photonic integrated FMCW coherent LIDAR receiving chip

A microcomb-empowered Fourier domain mode-locked LiDAR

High-speed Spectral-scanning FMCW LiDAR System Based on Tunable VCSEL

Linearization of wavelength sweeping lasers for the construction of 4-D FMCW LiDAR images of slow-moving objects using baseband beat note signals

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform