Abstract:The key advantage of silicon photonics comes from its potential for large scale integration, in a low-cost and scalable fashion. This has sustained the growth in the area despite disadvantages such as the lack of a monolithic light source, or the absence of a second order non-linear response ((2)). Thus far, the work in the field has focused on reporting individual devices from a single die, with excellent performances. Wafer-level results, an area which has not been addressed sufficiently, is a critical aspect of silicon photonics and will provide the community with information regarding scalability and variation, which has been the key differentiating advantage of silicon photonics over other photonic platforms. In this work, we report the development of a low-loss, high-bandwidth C-band silicon photonic platform on a 200 mm CMOS-compatible process line, demonstrating wafer-level performance in the process. Ultra-low waveguide propagation loss with median values as low as 0.43 dB/cm has been achieved. Silicon Mach-Zehnder and microring modulators with median bandwidth of 38.5 and 43 GHz respectively are presented. Finally, germanium waveguide-integrated photodetectors with median bandwidth of 43 GHz are reported. The results reported in this work are comparable to prior demonstrations concerning individual devices.

Width-modulated Half-Wavelength Pitch Silicon Waveguide Array for Dense Integration

Design of a Low-Crosstalk Half-Wavelength Pitch Nano-Structured Silicon Waveguide Array

Artificial Gauge Field Enabled Low-Crosstalk, Broadband, Half-Wavelength-pitched Waveguide Arrays

Design of a Low-Crosstalk Sub-Wavelength-Pitch Silicon Waveguide Array for Optical Phased Array

Design of an Ultra-Compact Low-Crosstalk Sinusoidal Silicon Waveguide Array for Optical Phased Array

Waveguide Superlattices with Artificial Gauge Field Towards Colorless and Crosstalkless Ultrahigh-Density Photonic Integration

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Electro-Optic Silicon Modulator With Horizontal Photonic Crystal Slot Slab

Crosstalk Reduction of Silicon Waveguide Array by High-Reflection Boundary

High performance ultra-compact SOI waveguide crossing.

Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects.

Low-Loss Waveguide Crossing for Complicated On-Chip Microwave Photonic Processor

Wafer-Scale Demonstration of Low-Loss (~0.43 dB/cm), High-Bandwidth (> 38 GHz), Silicon Photonics Platform Operating at the C-Band

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Ultrabroadband Low-Crosstalk Dense Lithium Niobate Waveguides by Floquet Engineering

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Ultra-compact high efficiency and low crosstalk optical interconnection structures based on inverse designed nanophotonic elements

Demonstration of an Ultra-Compact 8-Channel Sinusoidal Silicon Waveguide Array for Optical Phased Array.

Ultra-dense Dual-Polarization Waveguide Superlattices on Silicon

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices