Design of a Low-Energy Ion Implanter for Particle Radiation Testing of Materials in Space Application

Li Hao,Zheng Huiqi,Yu Qiang,Peng Yuchuan,Wang Junfeng,Huang Shouqing,Tang Zhenyu,Yang Yong,Ren Qiongying
DOI: https://doi.org/10.1109/icrms59672.2023.00133
2023-01-01
Abstract:Ion implanters are widely utilized in particle radiation testing of materials within the context of space applications. Their primary purpose is to validate the reliability of materials exposed to space environment. A novel low-energy ion implanter is presently under development, featuring several distinctive attributes aimed at facilitating the production of an ion beam characterized by high uniformity, a substantial irradiation area, and sustained flux stability. The initial step involves the utilization of multi-circle arc-shaped hot cathodes to emit electrons. Subsequently, a multilayer concentric cylindrical electrode, interspersed with hot cathodes, is introduced within the ionization chamber. This configuration paves the way for the ion extraction electrode to extend into the ionization chamber. Finally, an automated adjustment method for regulating ion flux at the target stage is incorporated into the design. These enhancements collectively contribute to heightened efficiency and improved quality in particle radiation testing for materials.
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