Effect of Activation Temperature on Photon-Stimulated Desorption from Ti-Zr-V Coated Copper Chambers

Wenjing Ma,Xiaopeng Xu,Wenli Zhang,Xinyu Jin,Tao Guo,Le Fan,Yuanzhi Hong,Sihui Wang
DOI: https://doi.org/10.1016/j.vacuum.2024.113746
IF: 4
2024-01-01
Vacuum
Abstract:Non-evaporable getter (NEG) films featuring distributed pumping properties and low photon-stimulated desorption (PSD) are widely utilized in particle accelerators, especially in diffraction limited storage rings (DLSR) with compact design. Activation is a requisite operation to sustain the pumping capacity of NEG films. Meanwhile, the vacuum properties of NEG films vary with activation temperature. In this work, the dependence of the PSD from NEG films is evaluated with the activation temperature. The columnar Ti-Zr-V films were deposited on the inner surface of the copper vacuum chamber by DC magnetron sputtering. The effect of activation temperature ranging from 150 to 200 degrees C and nitrogen venting on the PSD of Ti-Zr-V films was investigated. The results indicate that with elevating the activation temperature, the initial PSD yield of the Ti-Zr-V coated chamber consistently declines. Furthermore, the initial desorption of Ti-Zr-V films after nitrogen venting is between that of the non-activated state and the activated state.
What problem does this paper attempt to address?