Influence of Process Parameters on Properties of Super Invar Alloy Fabricated by Laser Powder Bed Fusion for Semiconductor Equipment

Renjie Zhao,Yakai Zhao,Meng Qin,Yubo Jia,Kai Feng,Zhuguo Li,Upadrasta Ramamurty,Renbiao Xie
DOI: https://doi.org/10.1016/j.addma.2024.104404
IF: 11
2024-01-01
Additive Manufacturing
Abstract:Super Invar alloy has drawn much attention for utilization in semiconductor equipment and other high-precision devices due to its even lower coefficient of thermal expansion than classical Invar 36. In this paper, a detailed study for the influence of process parameters combined with building sizes on the microstructures, porosities, hardnesses, tensile and thermal behaviors of multi-size Super Invar samples fabricated by laser powder bed fusion (LPBF) is conducted. The poor thermal conductivity of Super Invar leads to distinctive critical laser energies for full melting between spacings and layers. A positive correlation between the tensile strength and the hardness, and a negative correlation between the elastic modulus and the porosity within the areas parallel to tensile direction are identified. The increase of building size or volume apparently leads to more porosity, higher hardness, higher tensile strength, lower elongation, and lower horizontal elastic modulus of LPBF processed Super Invar alloy. The as-fabricated and standard-heat-treated Super Invar samples show very low coefficients of thermal expansion within 20-100 degrees C. The selected optimum parameter for comprehensive properties concerned in semiconductor equipment was employed to build a Super Invar mirror-holder used in the lithography machine, and its part stiffness performance was validated with an effective elastic modulus of 120-130 GPa.
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