Investigation into the Role of Si and SiC Phases in RB-SiC Ceramics Surface Modified Ultra-Precision Grinding

Jiabin Xu,Qiongyi He,Xiangyu Zhang,Xiude Yi,Yang Yu,Yingjie Li,Long Zhang,Runrun Gu,Feihu Zhang

DOI: https://doi.org/10.1016/j.mssp.2024.108786

IF: 4.1

2024-01-01

Materials Science in Semiconductor Processing

Abstract:RB-SiC ceramic has greater specific stiffness and thermal stability as space optical materials in the field of deep space exploration. To ultra-precision grinding advanced manufacturing technology drawbacks, a fabrication of highly shape accuracy and surface quality and surface modification assisted processing at room temperature. The RB-SiC ceramics are modified by plasma torches to produce compounds with lower hardness values, an exceptional surface quality (Sa S a surface roughness of [0.481, 0.959]), and has excellent thermal and chemical stability after surface modification process via 100 degrees C plasma torch at room temperature environment, which makes it an ideal suitable for the deep space exploration conditions such as space optical materials. In addition, oxygen(O2) 2 ) plasma surface modification and finite element simulation force-heat conduction of RB-SiC ceramic hard-brittle materials surface grinding force were compared with advanced manufacturing experiments of the precision grinding, revealing the formation mechanism and influence mechanism of surface micro-morphology during micro-cutting of precision grinding finish surface. The advanced manufacturing precision grinding difficulties of RB-SiC ceramic oxygen plasma torch reducing subsurface damage and removing space optical hard-brittle materials via ultra-precision grinding process of resin-funded corundum grinding wheel were solved. Subsurface damage (SSD) was effectively inhibited and its formation mechanism model.