A Piezoelectric MEMS Microphone with Proof Mass and Its Array

Liangyu Lu,Wenjuan Liu,Bohao Hu,Chaoxiang Yang,Zekai Wang,Yan Liu,Yao Cai,Jian Wang,Shishang Guo,Chengliang Sun
DOI: https://doi.org/10.1016/j.sna.2024.115735
2024-01-01
Abstract:Piezoelectric MEMS microphones (PMMs) have attracted increased attention in home automation, wearable devices and autonomous driving, since the high linearity, dustproof and waterproof, and easy manufacturing. In this paper, a hexagonal PMM with proof mass and its array in parallel are proposed using a 20 % Scandiumdoped Aluminum Nitride (ScAlN) thin film on a Silicon-on-insulator (SOI) wafer. The theoretical analysis, simulation, fabrication and verification test were discussed. The performance of the devices was simulated using the finite element simulation, and the resonant frequency is 102.85 kHz. The sensitivity of element and its array were measured up to -68.3 dB and -68.4 dB, respectively (re: 1 V/Pa). And the sensitivities of the element and array were -38.6 dB and -37.9 dB at 1 kHz (re: 1 V/Pa) after amplification and filtering. The SNR of the array was increased to 55.3 dB since the increased capacitance of array. Besides, the total harmonic distortion (THD) was measured 1.7% and 1.14%, respectively. The PMM and its array with high SNR and good THD is suitable to commercial acoustic fields, especially the high-noise scenarios.
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