Highly Sensitive Push-Pull Differential Pressure Sensor with Multi-Parameter Measurement Capabilities

Zhengxi He,Qiaoling Chen,Zengling Ran,Shengyi Qiu,Yanbo Xiao,Xiaoxue Ruan,Jiahui Yu,Yiwei Wang,Yunjiang Rao,Shinian Peng,Zhuoyue Li
DOI: https://doi.org/10.1016/j.optlastec.2024.111763
2025-01-01
Abstract:A multi-parameter sensor comprising of a Fabry-Perot (FP) pair and a fiber-optic FP microcavity was proposed for simultaneous measurement of differential pressure (DP), static pressure (SP) and temperature. The push-pull FP pair is used to measure the differential pressure, and wide measurement range can be achieved by adjusting the dimensions of the diaphragm. The self-enclosed fiber-optic microcavity is utilized to measure the static pressure. For multi-parameter measurement, a matrix equation is proposed to solve the differential pressure, static pressure and temperature by fully considering the relationship of the FP cavity lengths and measurands. The performance of multi-parameter sensing is verified experimentally. The sensitivities of differential pressure, static pressure and temperature are 294.4822 nm/KPa, 353.08 nm/MPa and 42.4056 nm/degrees C, respectively, in variation of cavity lengths. The sensing characteristics show good linearity. Such a sensor could find important applications in the fields of process industry and oil industry, etc.
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