The Manufacturing Process and Influencing Factors for Curved Aspheric-Microlens Arrays by Slow Tool Servo Machining

Zhenwei Xie,Yazhou Sun,Zhicheng He,Bohan Zhang,Chuyan Dai,Tao Sun,Xuesen Zhao,Haitao Liu
DOI: https://doi.org/10.1016/j.jmapro.2024.07.032
IF: 5.684
2024-01-01
Journal of Manufacturing Processes
Abstract:Microlens arrays (MLAs), as a key of precision optics, has been a research hotspot in the manufacturing field by slow tool servo machining (STSM). Compared to conventional planar spherical-microlens arrays, STSM has limited produce precision curved aspheric-microlens arrays (CAMLAs). In this article, a brand new surface prediction model has been developed pinpointed on CAMLAs for workpiece surfaces. The model considered the effects of tip radius, feeds per revolution, and the number of discrete points on the surface quality of CAMLAs, which facilitates the optimization of machining parameters. The reliability of the prediction model is verified by experiments on a three-axis ultra-precision machine tool. Finally, by optimizing the process parameters, we successfully machined the CAMLAs as expected with the surface shape error PV = 0 . 578 mu m and the surface roughness Sa=10.224 a =10.224 nm. The method is instructive for improving the quality of CAMLAs on the surface of workpieces by STSM.
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