Abstract:Understanding the complex properties of electronic and spintronic devices at the micro- and nano-scale is a topic of intense current interest as it becomes increasingly important for scientific progress and technological applications. In-operando characterization of such devices by scanned probe techniques is particularly well-suited for the microscopic study of these properties. We have developed a scanned probe microscope (SPM) which is capable of both standard force imaging (atomic, magnetic, electrostatic) and simultaneous electrical transport measurements. We utilize flexible and inexpensive FPGA (field programmable gate array) hardware and a custom software framework developed in National Instrument's LabVIEW environment to perform the various aspects of microscope operation and device measurement. The FPGA-based approach enables sensitive, real-time cantilever frequency-shift detection. Using this system, we demonstrate electrostatic force microscopy of an electrically-biased graphene FET device. The combination of SPM and electrical transport also enables imaging of the transport response to a localized perturbation provided by the scanned cantilever tip. Facilitated by the broad presence of LabVIEW in the experimental sciences and the openness of our software solution, our system permits a wide variety of combined scanning and transport measurements by providing standardized interfaces and flexible access to all aspects of a measurement (input and output signals, and processed data). Our system also enables precise control of timing (synchronization of scanning and transport operations) and implementation of sophisticated feedback protocols, and thus should be broadly interesting and useful to practitioners in the field.

ATLAS-MAP: An Automated Test Station for Gated Electronic Transport Measurements

A New Method to Extract Gate Bias-Dependent Parasitic Resistances in GaAs Phemts

Pseudo transistor matrix for defect density extraction of gate oxide shorts

An FPGA-based system for generalised electron devices testing

Integration of on-chip field-effect transistor switches with dopantless Si/SiGe quantum dots for high-throughput testing

On-The-Fly Interface Trap Measurement And Its Impact On The Understanding Of Nbti Mechanism For P-Mosfets With Sion Gate Dielectric

A versatile LabVIEW and FPGA-based scanned probe microscope for in-operando electronic device characterization

Nondestructive KPFM-assisted Quality Control in Fabrication of GaAs High-Speed Electronics

High-throughput fabrication and semi-automated characterization of oxide thin film transistors

Nondestructive measurement of conductivity of doped GaAs using compact microwave instrument

A novel layout automation flow to facilitate test chip design for standard cell characterization

High-bandwidth low-current measurement system for automated and scalable probing of tunnel junctions in liquids

Addressable Test-Chip Compiler for Test Chip Design Automation and Transistor/yield Characterization

Development and Performance of the Nanoworkbench: A Four Tip STM for Electrical Conductivity Measurements Down to Sub-micrometer Scales

Design of an automated test bed for experimental Si and SiC SGTO devices

Ultra-Fast (13ns) Low Frequency/Microwave Transient Measurements, Application to GaN Transistors Characterization of Pulse to Pulse Stability

Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs

An Automated Test Platform for High-Throughput Micro-Electrochemical Characterization of Metallic Materials and Its Application on a Fe–Cr–Ni Combinatorial Materials Chip

Automatic tool for test set generation and DfT assessment in analog circuits

Development of a custom on-line ultrasonic vapour analyzer/flowmeter for the ATLAS inner detector, with application to gaseous tracking and Cherenkov detectors