Growth Behavior of Cristobalite SiO2 Coating on 4H-Sic Surface Via High-Temperature Oxidation

Moyu Wei,Siqi Zhao,Yunkai Li,Jingyi Jiao,Guoguo Yan,Xingfang Liu
DOI: https://doi.org/10.1016/j.ceramint.2024.06.216
IF: 5.532
2024-01-01
Ceramics International
Abstract:When SiO 2 films undergo oxidation on 4H-SiC, a distinctive crystalline phase, cristobalite, emerges at elevated temperatures. We deeply explored the growth mechanism of the crystallite, focusing on its dependence on the silicon sublimation process (SSO). Activation energy calculations confirmed that the oxidation after SSO above 1350 degrees C exhibits a lower activation energy. The reduced activation energy suggests the elimination of the solidphase diffusion process during oxidation. We devised a controllable growth process for the quartz phase to achieve a seamless transition from 0 to 100 % in the area proportion of cristobalite in SiO 2 . This strategic approach facilitates the precise preparation of oxide layers and holds potential applications in semiconductor device manufacturing.
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