Micro-Ag Particle Interlayer with High Dislocation Density for Sintered-Joining of Al2O3 and AlN in Air

Naiqiang Wang,Xiaoqing Si,Baiqi Zhang,Jianwei Gao,Mingsheng Li,Tong Lin,Rui Li,Chun Li,Junlei Qi,Jian Cao
DOI: https://doi.org/10.1016/j.ceramint.2024.05.186
IF: 5.532
2024-01-01
Ceramics International
Abstract:A novel sintered -joining of Al 2 O 3 and AlN is achieved for the first time using micro-Ag particle interlayers in air. In comparison with reactive air brazing, this method addresses the issue of reduced strength caused by air holes in brazed joints. Also, this sintered -joining method can be performed at a lower temperature (920 degrees C), improving the joint strength by relieving the residual stresses. The sintering effect of micro-Ag particles and their high density of dislocations promote the recovery and recrystallization of the Ag interlayer, as well as the interdiffusion of Ag and ceramic. Ag -O clusters formed at the interface can be embedded into oxygen vacancies on the ceramic surface, playing a key role in interfacial joining. By optimizing joining temperature, assembly pressure and holding time, a maximum joint shear strength of 85.2 MPa is achieved at 920 degrees C for 30 min with an assembly pressure of 1 MPa. This study successfully prepares Al 2 O 3 /AlN joints with excellent mechanical properties, providing a reliable foundation for the fabrication of power integrated circuits with efficient operation.
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