Optimization of Acceleration and Force Ripple of Planar Motor Based a Chamfered Magnet Array Considering Coil End Effect

Kai Liu,Fuxiang Chen,Shuo Zhao,Hao Zhang,Aoqi Hu,Yingtong Wu,Lizhan Zeng
DOI: https://doi.org/10.1016/j.sna.2024.115119
2024-01-01
Abstract:According to the increasing throughput and precision requirements of the wafer stage, this paper proposes a new 2-D magnet array to improve the acceleration and force precision of the planar motor. Firstly, an analytical model of the magnet array with chamfered magnets is established based on the harmonic model, in which the influences of the installation height and the magnetization are included. Then, a modified discrete element model of the runway-type coil is proposed to achieve accurate and efficient force calculation because over half of the force ripple is generated by the coil end, which is neglected in the simplified model. Finally, the influence of chamfered magnet array on the field and force is analyzed. The genetic algorithm is used to optimize the planar motor, which results in a 64% reduction in vertical force tipple and a 1.24 times increase in horizontal acceleration.
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