Sajjad Mohammadi,Jeffrey H. Lang,James L. Kirtley,David L. Trumper
Abstract:This paper presents analytical modeling and design of a high-acceleration, low-vibration slotless double-sided linear motor with an arbitrary Halbach array for lithography machines used in semiconductor manufacturing technology. Amperian current and magnetic charge models of permanent magnets are integrated into a hybrid approach to develop comprehensive analytical modeling. Unlike conventional methods that treat magnets as sources for Poisson's equations, the solution is reduced to Laplace's equations, with magnets being represented as boundary conditions. The magnetic fields and potentials within distinct regions, along with machine quantities such as shear stress, force-angle characteristics, torque profile, attraction force, misalignment force, and back-EMF, are derived, comprehensively analyzed, and compared to FEM results for accuracy validation. In addition, two models based on Poisson's equations in terms of scalar and vector potentials are derived, compared, and analyzed. Finally, design optimization and sensitivity analysis of a linear stage for lithography applications are discussed.
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to design a high - acceleration, low - vibration slotted - free double - sided linear motor for lithography machines used in semiconductor manufacturing technology. Specifically, the research aims to:
1. **Develop a comprehensive analytical model**: By combining the Ampere - current and magnetic - charge models, a new hybrid method for modeling permanent magnets is proposed, thereby simplifying the Poisson equation into the Laplace equation and treating the permanent magnets as boundary conditions. This eliminates the need to guess specific solutions and reduces the number of equations to be solved.
2. **Optimize motor design**: Design optimization is carried out for slotted - free linear motors with arbitrary Halbach array configurations, especially for motors in lithography applications. The research explores different - phase - number windings (such as three - phase and five - phase) and designs with and without back - irons to achieve higher acceleration and lower vibration and noise.
3. **Analyze key performance indicators**: Machine quantities such as magnetic field distribution, shear stress, force - angle characteristics, torque curves, suction forces, misalignment forces, and back - electromotive forces are derived and analyzed, and compared with finite - element - method (FEM) results to verify accuracy.
4. **Provide a flexible design framework**: A general - purpose design framework is developed that allows for arbitrary Halbach arrays and winding configurations, providing wide flexibility in the design space.
Through these efforts, the research aims to provide a high - performance linear - motor solution for the precision - positioning system in lithography machines, thereby improving the precision and efficiency of the semiconductor manufacturing process.
### Key formulas involved
- **Wave number expression**:
\[
k=\frac{2\pi}{\lambda}
\]
where \(\lambda\) is the pole - pitch pair, so one pole - pitch is \(\tau_p = \frac{\lambda}{2}\).
- **Current density**:
\[
J_m(t)=J_{\text{max}}\cos\left(\omega t+(m - 1)\frac{2\pi}{N_{ph}}+\phi_0\right)
\]
where \(m\) is the winding sequence from left to right, \(j\) represents the A, B, C, D, and E windings, \(J_{\text{max}}\) is the current - density amplitude, \(\omega = 2\pi f\) is the frequency, and \(\phi_0\) is the initial phase.
- **Flux density and field strength**:
\[
B_x=-\mu_0\frac{\partial\psi}{\partial y},\quad H_y =-\frac{\partial\psi}{\partial x}
\]
- **Field - strength relationship under boundary conditions**:
\[
B_x=-\mu_0\sum_{n = 1,3,\ldots}^{\infty}n k A_n e^{-nky}\sin(nkx),\quad H_y=-\sum_{n = 1,3,\ldots}^{\infty}n k A_n e^{-nky}\cos(nkx)
\]
These formulas and methods together form the core content of this research, aiming to provide theoretical basis and technical support for the design of high - precision, low - vibration linear motors.