Improving Deposition Density of Solution Processed Carbon Nanotubes by Substrate Treatment for High-Performance Flexible Thin Film Transistors

Li Xiang,Huaidong Ye,Xingge Yu,Jie Liu,Anlian Pan
DOI: https://doi.org/10.1109/led.2024.3368114
IF: 4.8157
2024-01-01
IEEE Electron Device Letters
Abstract:Carbon Nanotubes (CNTs) are a promisingsemiconducting material for flexible electronics due to theexceptional mechanical and electrical properties. However,there is a significant performance gap between CNT thin-film transistors (TFTs) fabricated on flexible substratesand those on rigid substrates, which has greatly hinderedtheir practical application. In this article, we investigatethe influence of substrate hydrophilicity on deposited CNTdensity. Furthermore, a substrate treatment technique com-patible with TFT manufacturing processes, the ultravio-let ozone (UVO) treatment, was proposed to enhance thedeposited CNT density on flexible substrates. Based onthis technique, we fabricate flexible CNT TFTs exhibiting acarrier mobility of 41.5 +/- 7.84 cm2.V-1.s-1, which exceedsthe performance of most previously reported flexible CNTTFTs and is even comparable to that fabricated on rigidsilicon substrates. This approach will effectively promotethe device performance of flexible CNT TFTs and provideimportant potentials for their practical application in high-performance flexible circuits.
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