A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor
Blaise Gassend,Luis Fernando Velásquez-García,Akintunde Ibitayo Akinwande,Manuel Martínez-Sánchez,B. Gassend,L.F. Velasquez-Garcia,A.I. Akinwande,M. Martinez-Sanchez
DOI: https://doi.org/10.1109/jmems.2009.2015475
IF: 2.829
2009-06-01
Journal of Microelectromechanical Systems
Abstract:This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids $\hbox{EMI-BF}_{4}$ and EMI-Im. The microelectromechanical systems (MEMS) electrospray array is composed of the following two microfabricated parts: 1) an emitter die with as many as 502 emitters in 1.13 $\hbox{cm}^{2}$ and 2) an extractor component that provides assembly alignment, electrical insulation, and a common bias voltage to the emitter array. The devices were created using Pyrex and silicon substrates, as well as microfabrication techniques such as deep reactive ion etching, low-temperature fusion bonding, and anodic bonding. The emitters are coated with black silicon, which acts as a wicking material for transporting the liquid to the emitter tips. The extractor electrode uses a 3-D MEMS packaging technology that allows hand assembly of the two components with micrometer-level precision. Experimental characterization of the MEMS electrospray array includes current–voltage characteristics, time-of-flight mass spectrometry, beam divergence, and imprints on a collector. The data show that with both ionic liquids and in both polarities, the electrospray array works in the pure ionic regime, emitting ions with as little as 500 V of bias voltage. The data suggest that the MEMS electrospray array ion source could be used in applications such as coating, printing, etching, and nanosatellite propulsion.$\hfill$[2008-0270]
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied