Simulation of Tip Parameters Influence on Electron Emission in SPEES

Jiwei Li,Cunyi Xu,Wenjie Liu,Fang Ke,Xiangjun Chen,Kangzhen Xu
2009-01-01
Abstract:The simulation of the Auger electron emissions in scanning probe electron energy spectrometer (SPEES) is reported. By simulating the trajectory of Auger electrons, we systematically investigate the dependence of the emission efficiency of Auger electrons on the shape of tip, the biasing voltage, and the distance between the tip and sample surface, as well as the intensity distributions of Auger electrons at the edge of tip-sample region. The results will be the significant reference for improving the sensitivity, spatial and energy resolutions of SPEEs.
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