Modification of a Scanning Tunneling Microscope for Measurement of Ballistic Electron Emission Microscopy

Satcher Hsieh,Jeongmin Hong,Jeffrey Bokor
2014-01-01
Abstract:Ballistic electron emission microscopy (BEEM) is a spatially resolved metrological tool most commonly used for subsurface interface structures at the nanometer scale. We modify a scanning tunneling microscope (STM) to perform BEEM measurement via design and fabrication of a novel sample stage. Furthermore, we design and fabricate an external magnetic field source that encapsulates the sample stage, setting the foundation for future measurement of ballistic electron magnetic microscopy (BEMM). Instrumentation of the device and characterization of a sample with an ohmic interface, Ni-Si, are implemented and discussed.
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