A simple, static and stage mounted direct electron detector based electron backscatter diffraction system

Tianbi Zhang,T. Ben Britton
DOI: https://doi.org/10.1016/j.micron.2023.103582
2023-12-20
Abstract:To engineer the next generation of advanced materials we must understand their microstructure, and this requires microstructural characterization. This can be achieved through the collection of high contrast, data rich, and insightful microstructural maps. Electron backscatter diffraction (EBSD) has emerged as a popular tool available within the scanning electron microscope (SEM), where maps are realized through the repeat capture and analysis of Kikuchi diffraction patterns. Typical commercial EBSD systems require large and sophisticated detectors that are mounted on the side of the SEM vacuum chamber which can be limiting in terms of widespread access to the technique. In this work, we present an alternative open-hardware solution based upon a compact EBSD system with a simple, static geometry that uses an off-the-shelf direct electron detector co-mounted with a sample. This simple stage is easy to manufacture and improves our knowledge of the diffraction geometry significantly. Microscope and detector control is achieved through software application programming interface (API) integration. After pattern capture, analysis of the diffraction patterns is performed using open-source analysis within AstroEBSD. To demonstrate the potential of this set up, we present two simple EBSD experiments using line scan and mapping. We hope that the present system can inspire simpler EBSD system design for widespread access to the EBSD technique and promote the use of open-source software and hardware in the workflow of EBSD experiments.
Materials Science
What problem does this paper attempt to address?
The problems that this paper attempts to solve mainly focus on improving the accessibility and flexibility of Electron Back - Scatter Diffraction (EBSD) technology. Specifically, the authors propose an EBSD system with a simple, static geometry based on a Compact Direct - Electron Detector (DED). Traditional EBSD systems usually require large and complex detectors installed on one side of the SEM vacuum chamber, which limits the wide application of this technology. The solution proposed in this paper aims to improve this situation through the following aspects: 1. **Simplify hardware design**: A compact EBSD system based on an off - the - shelf direct - electron detector is proposed. This detector is co - installed on a sub - stage with the sample, thus simplifying the installation and use of the system and at the same time enhancing the understanding of diffraction geometry. 2. **Improve accessibility**: By providing an open - hardware solution, more laboratories can easily obtain and use this advanced material characterization technology, especially those laboratories that may not have sufficient resources to purchase expensive commercial systems. 3. **Enhance data - processing capabilities**: Use open - source software for data processing and analysis, such as the AstroEBSD toolbox. This not only reduces costs but also promotes the development and improvement of the technology. 4. **Improve resolution and signal quality**: The direct - electron detector can provide high - quality EBSD patterns because of its high resolution and Signal - to - Noise Ratio (SNR), which is crucial for achieving high - resolution measurements and advanced algorithms. In conclusion, the goal of this research is to promote the application of EBSD technology in materials science research, especially in those laboratories with limited resources, by developing a simpler, lower - cost and higher - performance EBSD system.