Abstract:To engineer the next generation of advanced materials we must understand their microstructure, and this requires microstructural characterization. This can be achieved through the collection of high contrast, data rich, and insightful microstructural maps. Electron backscatter diffraction (EBSD) has emerged as a popular tool available within the scanning electron microscope (SEM), where maps are realized through the repeat capture and analysis of Kikuchi diffraction patterns. Typical commercial EBSD systems require large and sophisticated detectors that are mounted on the side of the SEM vacuum chamber which can be limiting in terms of widespread access to the technique. In this work, we present an alternative open-hardware solution based upon a compact EBSD system with a simple, static geometry that uses an off-the-shelf direct electron detector co-mounted with a sample. This simple stage is easy to manufacture and improves our knowledge of the diffraction geometry significantly. Microscope and detector control is achieved through software application programming interface (API) integration. After pattern capture, analysis of the diffraction patterns is performed using open-source analysis within AstroEBSD. To demonstrate the potential of this set up, we present two simple EBSD experiments using line scan and mapping. We hope that the present system can inspire simpler EBSD system design for widespread access to the EBSD technique and promote the use of open-source software and hardware in the workflow of EBSD experiments.

A review of the preparation methods and techniques of electron backscatter diffraction (EBSD) samples

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A simple, static and stage mounted direct electron detector based electron backscatter diffraction system

A review of EBSD: from rudimentary on line orientation measurements to high resolution elastic strain measurements over the past 30 years.

Micro-stress-strain analysis in materials based upon EBSD technique: a review

Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review

Rapid Electron Backscatter Diffraction Mapping: Painting by Numbers

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Correction of Electron Back-scattered Diffraction datasets using an evolutionary algorithm

Application of EBSD Technique to the Microtexture Analyses

EBSD studies on historical relics analysis and ancient artifact manufacturing processes

Improved High-Resolution EBSD Analyses by Correcting Radial Distortion of Electron Diffraction Patterns

Processing and Interpretation of EBSD Data Gathered from Plastically Deformed Metals

Application of EBSD to analyzing low strain level microstructure