Analysis and Calibration of Electron-Dispersive Spectroscope and Scanning Electron Microscope Parameters to Improve their Results

Hamidreza Moradi,Fatemeh Mehradnia
2023-10-23
Abstract:The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with high resolution being a crucial one. To determine the practically achievable resolution of the SEM, reference materials such as gold particles on carbon substrate are commonly utilized. On the other hand, high demanding, and usual materials such as brass, aluminum oxide or MEMs are of high importance to be considered in the way of improving material characterization. In this study five different samples were analyzed in four steps to see the effect of astigmatism and aperture misalignment, the mirror effect on the charged uncoated sample in backscattered electron (BSE) and secondary electron (SE) images, compositional and topographical analysis using both qualitative and quantitative methods and finally apply all the steps on a micro-electromechanical system (MEMS) device. This study illustrates the possibility of controlling the mirror effect by adjusting the input parameters even in the cases that the user needs to have low accelerating voltage for the experiment. Besides, the discussion addresses possible reasons for the absence of some peaks in EDS analysis for some specific elements.
Applied Physics
What problem does this paper attempt to address?
The paper attempts to address the issue of how to improve the imaging and analysis quality of Scanning Electron Microscopes (SEM) and Energy Dispersive X-ray Spectrometers (EDS) by analyzing and calibrating their parameters. Specifically, the study aims to: 1. **Evaluate and optimize resolution**: Determine the actual achievable resolution of the SEM using reference materials (such as gold particles on a carbon substrate) and explore how to control mirror effects by adjusting input parameters, even when low acceleration voltage is required for the experiment. 2. **Improvement in material characterization**: Study the performance of five different samples in four steps, including: - **Effects of astigmatism and aperture misalignment**: Analyze the impact of astigmatism and aperture misalignment on imaging quality. - **Effects of coating treatment**: Investigate the effects of coating treatment on uncoated materials and on backscattered electron (BSE) and secondary electron (SE) images, particularly observing the charging effect of uncoated samples. - **Composition and morphology analysis**: Perform qualitative and quantitative analysis of composition and morphology. - **Application to MEMS devices**: Apply all the above steps to Micro-Electro-Mechanical Systems (MEMS) devices to evaluate the overall effect. 3. **Address issues in EDS analysis**: Explore possible reasons for the absence of peaks of certain specific elements in EDS analysis. Through these steps, the study hopes to provide scientists with a method to better set experimental parameters, understand the impact of parameter changes on SEM and EDS results, and ultimately improve the accuracy of material characterization.