Abstract:Scanning electron microscopy/energy dispersive X-ray spectrometry (SEM/EDS) is a widely applied elemental microanalysis method capable of identifying and quantifying all elements in the periodic table except H, He, and Li. By following the "k-ratio" (unknown/standard) measurement protocol development for electron-excited wavelength dispersive spectrometry (WDS), SEM/EDS can achieve accuracy and precision equivalent to WDS and at substantially lower electron dose, even when severe X-ray peak overlaps occur, provided sufficient counts are recorded. Achieving this level of performance is now much more practical with the advent of the high-throughput silicon drift detector energy dispersive X-ray spectrometer (SDD-EDS). However, three measurement issues continue to diminish the impact of SEM/EDS: (1) In the qualitative analysis (i.e., element identification) that must precede quantitative analysis, at least some current and many legacy software systems are vulnerable to occasional misidentification of major constituent peaks, with the frequency of misidentifications rising significantly for minor and trace constituents. (2) The use of standardless analysis, which is subject to much broader systematic errors, leads to quantitative results that, while useful, do not have sufficient accuracy to solve critical problems, e.g. determining the formula of a compound. (3) EDS spectrometers have such a large volume of acceptance that apparently credible spectra can be obtained from specimens with complex topography that introduce uncontrolled geometric factors that modify X-ray generation and propagation, resulting in very large systematic errors, often a factor of ten or more.

What problem does this paper attempt to address?

This paper attempts to solve several key problems in the quantitative analysis of scanning electron microscope/energy - dispersive X - ray spectrometer (SEM/EDS) to improve its accuracy and reliability. Specifically, the paper focuses on the following aspects: 1. **Accuracy of element identification**: Before quantitative analysis, qualitative analysis (i.e., element identification) must be carried out first. However, current and many older software systems occasionally misidentify major component peaks, and the misidentification frequency for minor and trace components increases significantly. This affects the accuracy of subsequent quantitative analysis. 2. **Limitations of standard - free analysis**: Although standard - free analysis is useful, due to more extensive systematic errors, the accuracy of its results is not sufficient to solve some key problems, such as determining the chemical formula of a compound. 3. **Effect of complex sample morphology**: The EDS spectrometer has a large acceptance volume, so it can obtain seemingly credible spectra from samples with complex morphologies. However, this complex morphology will introduce uncontrolled geometric factors, change the generation and propagation paths of X - rays, and lead to very large systematic errors, usually up to ten times or more. To solve these problems, the paper explores how to improve the quantitative analysis ability of SEM/EDS through the following methods: - **Using high - throughput silicon drift detectors (SDD - EDS)**: This new type of detector can significantly improve the data acquisition speed and accuracy, and can achieve performance comparable to that of wavelength - dispersive spectrometers (WDS) even in the case of severe X - ray peak overlap. - **Strictly following the "k - ratio" measurement protocol**: By measuring the X - ray intensity ratio (k - ratio) between the unknown sample and the standard sample and performing it under the same instrument conditions, the influence of instrument efficiency on the results can be eliminated, thereby improving the precision of quantitative analysis. - **Controlling sample geometry**: Ensure that the sample surface is flat enough to reduce errors caused by geometric effects. For example, low - energy photons (<4 keV) are particularly susceptible to the influence of absorption path length, so more refined polishing is required to reduce these errors. In summary, the paper aims to improve the accuracy and reliability of SEM/EDS in quantitative analysis by improving its measurement techniques and sample preparation methods, so that it can be better applied in scientific research and industrial testing.

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