Some Applications of Electron Back Scattering Diffraction (EBSD) in Materials Research

zhongwei chen,yanqing yang,huisheng jiao
DOI: https://doi.org/10.5772/35267
2012-01-01
Abstract:Electron Back Scattering Diffraction (EBSD) is a technique based on the analysis of the Kikuchi pattern by the excitation of the electron beam on the surface of the sample in a scanning electron microscope (SEM). The crystal structure, orientation and correlative information can be acquired by the technique. EBSD has a unique advantage in the determination of the crystal orientation and microstructure compared with the traditional analysis methods. It can observe the grain boundary types, misorientations, and the distribution of them, and the statistical measurement and quantitative analysis also can be carried out. Therefore, the quantitative relationship between grain boundary structure, orientation, texture and material properties can be established. Consequently, it has been a very important experimental technique in materials science and engineering.
What problem does this paper attempt to address?