Experimental Study on Integrated Influence of External Vibration and Scanning Rate Upon SPM Images

Chen Jin
2003-01-01
Abstract:This article was concentrated on the influence of external vibration on scanneing images of scanning probe microscope (SPM). The object studied was a DI MultiMode TM SPM. The external vibrating source was a PC speaker driven by a Tektronix ambient waveform generator AWG2021. A SIOS miniature interferometric vibrometer SP S was used as vibration measuring system. The influence of 0~7kHz harmonic vibration of SPM base on the scanning images was studied. The results of experiments were concluded as: external vibration influence on SPM base was different from the one on tip sample interaction; great influence of the external vibration appeared in 0~1kHz, and weak at higher frequency ranges; SPM image was influenced by the combination of external vibration and scanning rate; viscoelastic model of the tip sample interaction theory should be used to study the vibration influence on SPM.
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