Broadband Silicon Nitride Multi-Mode Interferometer with Sub-Wavelength Gratings

Shuqing Lin,Yanfeng Zhang,Siyuan Yu

DOI: https://doi.org/10.1364/fio.2023.jw4a.42

2023-01-01

Abstract:We designed a silicon nitride multimode interferometer coupler with ultra-broad bandwidth up to 400 nm using sub-wavelength gratings and developed a stable process flow that can filled the grating gap well.

What problem does this paper attempt to address?

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
Broadband and High-Performance Devices for the Silicon and Silicon-Nitride Platforms

I. Molina-Fernandez,Robert Halir,A. Ortega-Monux,J. G. Wanguemert-Perez,Yang Chen,Jian-Jun He,Pavel Cheben,Jens H. Schmid,T. Dominguez Bucio,Ali Z. Khokhar,M. Banakar,K. Grabska,Frederic Y. Gardes

DOI: https://doi.org/10.1109/icton.2017.8024925

2017-01-01

Abstract:The increasing demand for higher data rates and small form factor equipment for optical networks is fuelling research on integrated optical devices with small footprint and broad bandwidth. Here, we present novel design approaches for grating couplers in the silicon and silicon nitride platforms that enable broadband operation and highly efficient coupling. Furthermore, we report experimental findings on compact integrated waveguide splitters that provide virtual perfect performance over more than 300 nm of bandwidth at telecom wavelengths.
Broadband 2 × 2 multimode-interference coupler on the silicon-nitride platform

xiheng ai,Yang Zhang,Wei-lun Hsu,Sylvain Veilleux,Mario Dagenais,Xiheng Ai,Wei-Lun Hsu

DOI: https://doi.org/10.1364/oe.513796

IF: 3.8

2024-03-02

Optics Express

Abstract:Xiheng Ai, Yang Zhang, Wei-Lun Hsu, Sylvain Veilleux, Mario Dagenais In this paper, we present the design, optimization, and implementation of a sub-wavelength grating (SWG) multi-mode interference coupler ... [Opt. Express 32, 9405-9419 (2024)]

optics
Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Yang Chen,Thalia Dominguez Bucio,Ali Z. Khokhar,Mehdi Banakar,Katarzyna Grabska,Frederic Y. Gardes,Robert Halir,Inigo Molina-Fernandez,Pavel Cheben,Jian-Jun He

DOI: https://doi.org/10.1364/ol.42.003566

2017-01-01

Abstract:A silicon nitride waveguide is a promising platform for integrated photonics, particularly due to its low propagation loss compared to other complementary metal-oxide-semiconductor compatible waveguides, including silicon-on-insulator. Input/output coupling in such thin optical waveguides is a key issue for practical implementations. Fiber-to-chip grating couplers in silicon nitride usually exhibit low coupling efficiency because the moderate index contrast leads to weak radiation strengths and poor directionality. Here, we present the first, to the best of our knowledge, experimental demonstration of a recently proposed apodized-imaging fiber-to-chip grating coupler in silicon nitride that images an in-plane waveguide mode to an optical fiber placed at a specific distance above the chip. By employing amplitude and phase apodization, the diffracted optical field of the grating is matched to the fiber mode. High grating directionality is achieved by using staircase grating teeth, which produce a blazing effect. Experimental results demonstrate an apodized-imaging grating coupler with a record coupling efficiency of -1.5 dB and a 3 dB bandwidth of 60 nm in the C-band. (C) 2017 Optical Society of America
High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

Yang Chen,Robert Halir,Inigo Molina-Fernandez,Pavel Cheben,Jian-Jun He

DOI: https://doi.org/10.1364/ol.41.005059

2016-01-01

Abstract:Chip-fiber grating couplers have been widely used in silicon-on-insulator platforms. In silicon nitride waveguides, the lower index contrast yields gratings with a weaker radiation strength and poor directionality, thereby limiting the coupling efficiency. Here we propose and design an apodized self-imaging grating coupler in silicon nitride that images an in-plane waveguide input to an output optical fiber placed at a specific distance above the chip. Both amplitude and phase apodizations are employed to engineer the transfer function of the self-imaging grating to produce an image field matching the fiber mode profile. Two-step etch staircase grating teeth are used to achieve directionality as high as 93%. Full three-dimensional finite-difference time-domain simulations show coupling from a 40 μm×40 μm grating to an SMF-28 single mode fiber with a record calculated efficiency of 86% (0.66 dB loss) and a 3 dB bandwidth of 40 nm near the 1550 nm wavelength.
High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Jian Jian,Pengfei Xu,Hui Chen,Mingbo He,Zeru Wu,Lidan Zhou,Lin Liu,Chunchuan Yang,Siyuan Yu

DOI: https://doi.org/10.1364/OE.26.029651

IF: 3.8

2018-01-01

Optics Express

Abstract:We demonstrate hybrid amorphous silicon uniform grating couplers for efficient coupling between the standard single-mode fiber and sub-micron lithium niobate waveguides. The grating couplers exhibit coupling efficiency of -3.06 dB and 1-dB bandwidth of 55 nm. The amorphous silicon grating couplers can also provide a universal building block applicable to other photonic platforms such as silicon nitride waveguides, whose moderate refractive index values prevent high efficiency grating couplers to be fabricated in the native waveguide. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
Wideband Subwavelength Gratings for Coupling Between Silicon-on-insulator Waveguides and Optical Fibers.

Xia Chen,Ke Xu,Zhenzhou Cheng,Christy K. Y. Fung,Hon K. Tsang

DOI: https://doi.org/10.1364/ol.37.003483

2012-01-01

Abstract:We propose and experimentally demonstrate a novel subwavelength grating coupler on silicon-on-insulator, for coupling to optical fibers with a wide optical bandwidth. Theoretical analysis and design optimization of the coupler are described. About 73 nm 1 dB bandwidth was experimentally demonstrated with -5.6 dB coupling efficiency. Better than -3.4 dB efficiency with 86 nm 1 dB bandwidth is predicted for these structures with optimized buried oxide thickness. (c) 2012 Optical Society of America
Integrated Broadband Filter with Sharp Transition Edges Based on SiN and SiON Composite Waveguide Coupler

Xiao Ma,Qiongchan Shao,Jiamei Gu,Tingting Lang,Xiang Guo,Jian-Jun He

DOI: https://doi.org/10.3390/photonics10111285

IF: 2.536

2023-01-01

Photonics

Abstract:Broadband filters with sharp transition edges are important elements in diverse applications, including Raman and fluorescence spectral analysis, wideband wavelength-division multiplexing (WDM), and multi-octave interferometry. While the multi-layer thin-film interference broadband filter has been widely applied in various free-space optical systems, its integrated counterpart is still far from mature, which is also highly desired for constructing chip-scale miniature optical modules. In this article, we design, fabricate, and characterize an integrated broadband filter with sharp transition edges. An adiabatic coupler based on silicon nitride (SiN) and silicon oxynitride (SiON) composite waveguide is employed here. Long-pass, short-pass, band-pass, and band-stop filters can be realized in a single design of the composite waveguide coupler for a specific wavelength range, with only a difference in the SiN taper waveguide width. Experimental results with a roll-off value of larger than 0.7 dB nm−1 and a 15 dB extinction ratio (ER) are presented.
High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics

William Fraser,Radovan Korček,Ivan Glesk,Jan Litvik,Jens H. Schmid,Pavel Cheben,Winnie N. Ye,Daniel Benedikovic

DOI: https://doi.org/10.3390/nano14070581

IF: 5.3

2024-03-27

Nanomaterials

Abstract:Silicon nitride (Si3N4) is an ideal candidate for the development of low-loss photonic integrated circuits. However, efficient light coupling between standard optical fibers and Si3N4 chips remains a significant challenge. For vertical grating couplers, the lower index contrast yields a weak grating strength, which translates to long diffractive structures, limiting the coupling performance. In response to the rise of hybrid photonic platforms, the adoption of multi-layer grating arrangements has emerged as a promising strategy to enhance the performance of Si3N4 couplers. In this work, we present the design of high-efficiency surface grating couplers for the Si3N4 platform with an amorphous silicon (α-Si) overlay. The surface grating, fully formed in an α-Si waveguide layer, utilizes subwavelength grating (SWG)-engineered metamaterials, enabling simple realization through single-step patterning. This not only provides an extra degree of freedom for controlling the fiber–chip coupling but also facilitates portability to existing foundry fabrication processes. Using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations, a metamaterial-engineered grating coupler is designed with a coupling efficiency of −1.7 dB at an operating wavelength of 1.31 μm, with a 1 dB bandwidth of 31 nm. Our proposed design presents a novel approach to developing high-efficiency fiber–chip interfaces for the silicon nitride integration platform for a wide range of applications, including datacom and quantum photonics.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
Inverse Design of High Extinction Ration Narrow-Band Filters Based on Silicon Nitride Multimode Waveguide Bragg Gratings

Nannan Ning,Wei Zhujun,Huang Qikai,Wang Yuehai,Yang Jianyi,Yu Hui

DOI: https://doi.org/10.1117/12.3009299

2023-01-01

Abstract:A silicon nitride narrow-band multimode waveguide Bragg grating (NBMWBG) optical filter with high SLSR and low insertion loss based on the inverse design of MWBG is demonstrated. The complementary lateral-misalignment modulation apodization is used to create physically grating structure of NBMWBG. The insertion loss, 3-dB bandwidth and SLSR of proposed NBMWBG are measured to be 0.9 dB, 0.8 nm and 32 dB, respectively. Keywords: Silicon nitride, Bragg grating, Narrow-band,
High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

William Fraser,Daniel Benedikovic,Radovan Korcek,Maziyar Milanizadeh,Dan-Xia Xu,Jens H. Schmid,Pavel Cheben,Winnie N. Ye

DOI: https://doi.org/10.1038/s41598-024-62336-0

IF: 4.6

2024-05-24

Scientific Reports

Abstract:Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. Due to the reduced grating strength, a longer structure is required to radiate the light from the chip which produces a diffracted field that is too wide to couple into the fiber. In this work, we present a novel grating coupler architecture for silicon nitride photonic integrated circuits that utilizes an amorphous silicon (α-Si) overlay. The high refractive index of the α-Si overlay breaks the coupler's vertical symmetry which increases the directionality. We implement subwavelength metamaterial apodization to optimize the overlap of the diffracted field with the optical fiber Gaussian mode profile. Furthermore, the phase of the diffracted beam is engineered to focalize the field into an SMF-28 optical fiber placed 55 μm above the surface of the chip. The coupler was designed using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations supported by genetic algorithm optimization. Our grating coupler has a footprint of 26.8 × 32.7 μm 2 and operates in the O -band centered at 1.31 μm. It achieves a high directionality of 85% and a field overlap of 90% with a target fiber mode size of 9.2 μm at the focal plane. Our simulations predict a peak coupling efficiency of − 1.3 dB with a 1-dB bandwidth of 31 nm. The α-Si/SiN grating architecture presented in this work enables the development of compact and efficient optical interfaces for SiN integrated photonics circuits with applications including optical communications, sensing, and quantum photonics.

multidisciplinary sciences
Broadband Arbitrary Coupler Based on Asymmetric Mach-Zehnder Interferometers with Bezier Curves

Jiaqi Chen,Yuanbin Liu,Ziheng Ni,Liangjun Lu,Jianping Chen,Linjie Zhou

DOI: https://doi.org/10.1109/ACP/POEM59049.2023.10368769

2023-01-01

Abstract:We propose a broadband coupler based on cascaded Mach-Zehnder interferometers with Bezier curves on the silicon nitride platform, which has a wide operation wavelength range of 110 nm and good width/thickness fabrication tolerance.
Third Order Silicon (si) Nitride Side-Walled Grating Using Silicon-on- Insulatir (SOI)

C. E. Png,S. T. Lim,E. P. Li,A. J. Danner

DOI: https://doi.org/10.1117/12.888579

2010-01-01

Abstract:In this work, we demonstrate three-dimensional (3D) simulations of a third order silicon-based grating with full-width-half-maximum (FWKM) reflection bandwidth of 4nm. This is more than 2 orders of magnitude improvement over a conventional side-walled grating structure. The relationship of grating performance over the infra-red wavelength range is also presented. In order to make this device active, we included an active element, to be inserted in the silicon layer by way of a pin layout. The device has a low power consumption of 114nW and its intrinsic device modulation speed is predicted to function at 40.5MHz.
Compact Grating Coupler For Thick Silicon Nitride

Danping Li,Xiangjie Zhao,Cheng Zeng,Ge Gao,Zengzhi Huang,Jinsong Xia

DOI: https://doi.org/10.1364/OFC.2016.W2A.20

2016-01-01

Abstract:Thick Silicon nitride-on-insolater (SNOI) is widely used for nonlinear applications due to its broadband nearly-zero flattened dispersion. In this paper, we present a grating coupler for strip waveguides on 700-nm-thick SNOI. Focusing grating structure and inverse taper are combined to minify the footprint to 70.2 mu m x 19.7 mu m. The peak coupling efficiency is -3.7dB and the 1-dB bandwidth is 54nm.
Broadband Tunable Filter Based on the Loop of Multimode Bragg Grating.

Jianfei Jiang,Huiye Qiu,Gencheng Wang,Yan Li,Tingge Dai,Xiaofei Wang,Hui Yu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1364/oe.26.000559

IF: 3.8

2018-01-01

Optics Express

Abstract:A broadband tunable silicon filter has been demonstrated on silicon-on-insulator platform. The device is based on the loop of multimode anti-symmetric waveguide Bragg grating. A wide bandwidth tunability about 1.455 THz (0.117-1.572 THz) is achieved. The device, functions like a ring, can realize the bandwidth tunable of the drop port and the through port. And, its feature has simultaneous wavelength tuning and no free space ranges limitation. A high out-of-band contrast of 30 dB is achieved with a bandwidth of 1.572 THz (Δλ = 13 nm). The out-of-band contrast is 18 dB at the minimum bandwidth 0.117 THz (Δλ = 1.0 nm).
Broadband Polarization-Independent Edge Couplers With High Efficiency Based on SiN-Si Dual-Stage Structure

Yang Jiang,Zhewei Zhang,Peng Liu

DOI: https://doi.org/10.1109/jphot.2024.3379563

IF: 2.4

2024-04-03

IEEE Photonics Journal

Abstract:Silicon nitride (SiN) plays a critical role in silicon photonics because of its lower refractive index, low waveguide loss, broad operating bandwidth and compatibility with complementary metal oxide semiconductor (CMOS) fabrication process. Here, we propose a polarization-independent sub-wavelength grating (SWG) edge coupler with high efficiency based on SiN-Si dual-stage structure with a length of only 315.8 μm. Such a structure can be fabricated on 8-inch silicon photonics pilot lines and doesn't require special fabrication processes for making it suspended. We simulate the minimum TE/TM light coupling loss from a standard SMF-28 fiber to be 0.61 dB/0.95 dB with polarization dependent loss (PDL) less than 0.4 dB in the whole band between 1500 nm and 1600 nm.

engineering, electrical & electronic,optics,physics, applied
60-Nm-thick Basic Photonic Components and Bragg Gratings on the Silicon-on-insulator Platform.

Zhi Zou,Linjie Zhou,Xinwan Li,Jianping Chen

DOI: https://doi.org/10.1364/oe.23.020784

IF: 3.8

2015-01-01

Optics Express

Abstract:We demonstrate integrated basic photonic components and Bragg gratings using 60-nm-thick silicon-on-insulator strip waveguides. The ultra-thin waveguides exhibit a propagation loss of 0.61 dB/cm and a bending loss of approximately 0.015 dB/180° with a 30 μm bending radius (including two straight-bend waveguide junctions). Basic structures based on the ultra-thin waveguides, including micro-ring resonators, 1 × 2 MMI couplers, and Mach-Zehnder interferometers are realized. Upon thinning-down, the waveguide effective refractive index is reduced, making the fabrication of Bragg gratings possible using the standard 248-nm deep ultra-violet (DUV) photolithography process. The Bragg grating exhibits a stopband width of 1 nm and an extinction ratio of 35 dB, which is practically applicable as an optical filter or a delay line. The transmission spectrum can be thermally tuned via an integrated resistive micro-heater formed by a heavily doped silicon slab beside the waveguide.
High Efficiency and Broad Bandwidth Grating Coupler Between Nanophotonic Waveguide and Fibre

Zhu Yu,Xu Xue-Jun,Li Zhi-Yong,Zhou Liang,Han Wei-Hua,Fan Zhong-Chao,Yu,Yu Jin-Zhong

DOI: https://doi.org/10.1088/1674-1056/19/1/014219

2010-01-01

Abstract:A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55 mu m are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 nm from 1530 nm to 1575 nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of +/-2 mu m results in less than 1 dB additional coupling loss.
Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically

Lirong Cheng,Simei Mao,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/jlt.2021.3090172

IF: 4.7

2021-01-01

Journal of Lightwave Technology

Abstract:We propose and design a novel dual-wavelength-band grating coupler on 220-nm-thick silicon-on-insulator and experimentally investigate its capability to couple two wavelength bands simultaneously under surface-normal fiber placement. Such dual-wavelength-band operation take advantage of a dual-etch grating design not only with increased directionality but also with unique diffraction angle dispersion characteristics for the two targeted wavelength bands. The role of high numerical aperture fiber is theoretically investigated, leading to reduced angular sensitivity in general and subsequently increased coupling efficiency for our proposed dual-wavelength-band operation scheme. Our device is further fabricated using 248-nm deep-UV lithography on an 8-inch wafer for verification. The peak coupling efficiency is measured to be -5.0 dB at 1275 nm and -5.9 dB at 1519 nm for O-band and S/C-band respectively.

Broadband Silicon Nitride Multi-Mode Interferometer with Sub-Wavelength Gratings

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Broadband and High-Performance Devices for the Silicon and Silicon-Nitride Platforms

Broadband 2 × 2 multimode-interference coupler on the silicon-nitride platform

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Wideband Subwavelength Gratings for Coupling Between Silicon-on-insulator Waveguides and Optical Fibers.

Integrated Broadband Filter with Sharp Transition Edges Based on SiN and SiON Composite Waveguide Coupler

High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics

Inverse Design of High Extinction Ration Narrow-Band Filters Based on Silicon Nitride Multimode Waveguide Bragg Gratings

High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

Broadband Arbitrary Coupler Based on Asymmetric Mach-Zehnder Interferometers with Bezier Curves

Third Order Silicon (si) Nitride Side-Walled Grating Using Silicon-on- Insulatir (SOI)

Compact Grating Coupler For Thick Silicon Nitride

Broadband Tunable Filter Based on the Loop of Multimode Bragg Grating.

Broadband Polarization-Independent Edge Couplers With High Efficiency Based on SiN-Si Dual-Stage Structure

60-Nm-thick Basic Photonic Components and Bragg Gratings on the Silicon-on-insulator Platform.

High Efficiency and Broad Bandwidth Grating Coupler Between Nanophotonic Waveguide and Fibre

Dual-Wavelength-Band Grating Coupler on 220-Nm Silicon-on-Insulator with High Numerical Aperture Fiber Placed Perfectly Vertically