Abstract:Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. Due to the reduced grating strength, a longer structure is required to radiate the light from the chip which produces a diffracted field that is too wide to couple into the fiber. In this work, we present a novel grating coupler architecture for silicon nitride photonic integrated circuits that utilizes an amorphous silicon (α-Si) overlay. The high refractive index of the α-Si overlay breaks the coupler's vertical symmetry which increases the directionality. We implement subwavelength metamaterial apodization to optimize the overlap of the diffracted field with the optical fiber Gaussian mode profile. Furthermore, the phase of the diffracted beam is engineered to focalize the field into an SMF-28 optical fiber placed 55 μm above the surface of the chip. The coupler was designed using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations supported by genetic algorithm optimization. Our grating coupler has a footprint of 26.8 × 32.7 μm 2 and operates in the O -band centered at 1.31 μm. It achieves a high directionality of 85% and a field overlap of 90% with a target fiber mode size of 9.2 μm at the focal plane. Our simulations predict a peak coupling efficiency of − 1.3 dB with a 1-dB bandwidth of 31 nm. The α-Si/SiN grating architecture presented in this work enables the development of compact and efficient optical interfaces for SiN integrated photonics circuits with applications including optical communications, sensing, and quantum photonics.

Broadband and High-Performance Devices for the Silicon and Silicon-Nitride Platforms

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Integrated Nano-Structured Silicon Waveguides and Devices for High-Speed Optical Communications

High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

Development of Silicon Photonic Devices for Optical Interconnects

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

Silicon photonics for high-speed communications and photonic signal processing

Single-mode Dispersion-engineered Nonlinear Integrated Waveguides for Ultra-broadband Optical Amplification and Wavelength Conversion

Broadband Polarization-Independent Edge Couplers With High Efficiency Based on SiN-Si Dual-Stage Structure

Nonlinear Optics on A Silicon Platform for Broadband Light Generation and Ultrafast Information Processing

Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity

Silicon Photonics Integration for Future Generation Optical Network.

High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

Integrated Photonic Devices and Circuits in Hybrid Silicon Platforms

High-Performance Silicon Photonics Using Heterogeneous Integration

Wideband Subwavelength Gratings for Coupling Between Silicon-on-insulator Waveguides and Optical Fibers.