Study on New Development and Future Trends of Micromachined Gyroscopes

Xugang Xi
2014-01-01
Abstract:The micromachined gyroscopes are a new generation inertial devices which combined the gyro technologies and MEMS technology.Based on the different operating principles and materials,micromachined gyroscopes can be mainly categorized into Si-based micromachined vibrating gyroscopes(Si-MVGs),micromachined piezoelectric vibrating gyroscopes(PVGs),micromachined gyroscopes with levitated rotor etc.The main parameters and applications of the micromachined vibrating gyroscopes are introduced in this paper.The current developments of the various micromachined gyroscopes have been overviewed and the future trends of micromachined gyroscopes are also discussed.
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