Abstract:It has recently been shown that solid-state nanometer-scale pores ('nanopores') can be used as highly sensitive single-molecule sensors. For example, electrophoretic translocation of DNA, RNA and proteins through such nanopores has enabled both detection and structural analysis of these complex biomolecules. Control over the nanopore size is critical as the pore must be comparable in size to the analyte molecule in question. The most widely used fabrication methods are based on focused electron or ion beams and thus require (scanning) transmission electron microscopy and focused ion beam (FIB) instrumentation. Even though very small pores have been made using these approaches, several issues remain. These include the requirement of being restricted to rather thin, mechanically less stable membranes, particularly for pore diameters in the single-digit nanometer range, lack of control of the surface properties at and inside the nanopore, and finally, the fabrication cost. In the proof-of-concept study, we report on a novel and simple route for fabricating metal nanopores with apparent diameters below 20 nm using electrodeposition and real-time ionic current feedback in solution. This fabrication approach inserts considerable flexibility into the kinds of platforms that can be used and the nanopore membrane material. Starting from much larger pores, which are straightforward to make using FIB or other semiconductor fabrication methods, we electrodeposit Pt at the nanopore interface while monitoring its ionic conductance at the same time in a bi-potentiostatic setup. Due to the deposition of Pt, the nanopore decreases in size, resulting in a decrease of the pore conductance. Once a desired pore conductance has been reached, the electrodeposition process is stopped by switching the potential of the membrane electrode and the fabrication process is complete. Furthermore, we demonstrate that these pores can be used for single-biomolecule analysis, such as that of λ-DNA, which we use in a proof-of-concept study. Importantly, our approach is applicable to single nanopores as well as nanopore arrays, and can easily be extended to deposits of metal other than Pt.

Bionanotechnology: Zero‐Depth Interfacial Nanopore Capillaries (adv. Mater. 9/2018)

Zero‐Depth Interfacial Nanopore Capillaries

A zero-depth nanopore capillary for the analysis of translocating biomolecules

Fabrication and Applications of Solid-State Nanopores

Fabricatable Nanopore Sensors with an Atomic Thickness

Fabrication of solid-state nanopores

Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Bio-Inspired Subnanofluidics: Advanced Fabrication and Functionalization

Controllable Shrinking Fabrication of Solid-State Nanopores

Development of Solid-State Nanopore Fabrication Technologies

Integrating Sub-3 Nm Plasmonic Gaps into Solid-State Nanopores

Molecular Transport Through Capillaries Made with Atomic-Scale Precision

Atomic Engineering of Triangular Nanopores in Monolayer hBN: A Decoupled Seeding and Growth Approach

Shrinking solid-state nanopores using electron-beam-induced deposition

Nanopore‐Based Confined Spaces for Single‐Molecular Analysis

Monolithic Fabrication of NPN/SiNx Dual Membrane Cavity for Nanopore-based DNA Sensing

Fabrication of Sub-20 Nm Nanopore Arrays in Membranes with Embedded Metal Electrodes at Wafer Scales

Direct Fabrication of Sub-10 nm Nanopores in WO 3 Nanosheets Using Single Swift Heavy Ions

Full Width at Half Maximum of Nanopore Current Blockage Controlled by a Single-Biomolecule Interface

Integration of solid-state nanopore arrays via dry bonding to photostructured microfluidic networks

Sub-20 nm Nanopores Sculptured by a Single Nanosecond Laser Pulse