Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films
Xiyu Gu,Yan Liu,Yuanhang Qu,Liwenjuan Li,Yao Cai,Jiaqi Ding,Ting Yu,Shishang Guo,Chengliang Sun
DOI: https://doi.org/10.1016/j.coco.2023.101502
IF: 8
2023-01-18
Composites Communications
Abstract:Aluminum nitride (AlN) and Sc-doped AlN have become the most popular piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite films based on 2-2 connectivity exhibit stronger interaction and better lattice matching between AlN and AlScN, resulting in improved nucleation, growth kinetics, crystal quality, piezoelectric response, and surface morphology. In this work, a method for predicting the effective coefficients of AlN/AlScN composite piezoelectric thin films is proposed and validated. This prediction method is based on first-principles calculations, the Reuss model theory, and the Mori-Tanaka (MT) method. It also conforms to the mean strain and stress theory of the micromechanical approach. The precise compliance, dielectric and piezoelectric properties ( Sij , ε , dij ) of AlN/Al 0.8 Sc 0.2 N composite film with different thickness ratios are calculated. Through the deflection measurement of piezoelectric cantilever with proof mass based on AlN/Al 0.8 Sc 0.2 N composite film, the experimental piezoelectric stress coefficient ( d31 ) is calculated. The correctness of the prediction method is verified by comparing the theoretical calculation ( d31* = −3.1 pC/N ) and experimental data ( d31 = −3.4 pC/N ), showing excellent agreement within experimental error. Meanwhile, the voltage sensitivity of the accelerometer is significantly enhanced by the AlN/AlScN composite piezoelectric film. It is believed that this work will broaden the theoretical study and application of the AlN/AlScN composite piezoelectric film.
materials science, composites