Coherent Heterostructure Mesh Grown by Gap-Filling Epitaxial Chemical Vapor Deposition
Hongwei Liu,Zhenjing Liu,Xiangbin Cai,Hoilun Wong,Meizhen Huang,Mohammadreza Amjadian,Jun Wang,Mohsen Tamtaji,Jingwei Li,Ting Kang,Tsz Wing Tang,Yuting Cai,Mengyang Xu,Kenan Zhang,Tao Xu,Mengjia Xu,Xudong Sun,Guojie Chen,Zhaoli Gao,Ning Wang,Zhengtang Luo
DOI: https://doi.org/10.1021/acs.chemmater.2c00855
IF: 10.508
2022-05-13
Chemistry of Materials
Abstract:Lateral superlattices have been a research focus due to the strain induced in their coherent structure, while the growth of a large size heterostructure with high density of heterointerfaces remains challenging. In this work, we report a gap-filling approach to synthesize large-scale lateral mesh heterostructures of WS2 embedded in a MoS2 matrix. This synthesis method utilizes the uniformly distributed gaps in single crystalline MoS2, made by the sulfur substitution-induced transformation of metastable-MoTe2 as the growth pattern, for the second material growth. By finely controlling the growth kinetics, a highly crystalline WS2/MoS2 lateral heterostructure mesh is successfully grown. Optical images and Raman mapping show a clear spatial distribution of WS2 channels embedded in MoS2. The coherent epitaxial nature is further confirmed by scanning transmission electron microscopy, showing insignificant dislocation at the interfaces. Density function theory simulation suggests that the growth of WS2 starts from the edges of cracked MoS2. The MoS2/WS2/MoS2 heterostructure device demonstrates an intrinsic electric barrier formed at the interfaces. This work provides a new tool for the practical preparation of large-scale high density 2D heterostructures.
materials science, multidisciplinary,chemistry, physical