Electrochemical and Structural Characterization of Nanocomposite CrSiCN Coatings for Biological Dry Electrodes

Zhiwei Wu,Shulong Li,Weiqiang Wang,Ning Wang,Tao Zhou
DOI: https://doi.org/10.1007/s11665-023-08932-z
IF: 2.3
2023-01-01
Journal of Materials Engineering and Performance
Abstract:CrSiCN coatings were deposited on glass and Si(100) substrates using unbalanced magnetron sputtering with varying deposition biases (− 40 V, − 60 V, − 80 V) and graphite target currents (2A, 3A, 5A). The microstructure was characterized using x-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS), respectively. The results indicated that the CrSiCN coatings possessed a composite structure consisting of Cr(C, N) nanocrystals embedded in an amorphous matrix composed of a-SiNx and a-C/a-CN. Among all the coatings, the one deposited at high graphite target current (5A) exhibited the smallest grain size (5.4 nm) and lowest crystallinity (12.3
What problem does this paper attempt to address?