Abstract:The elevated temperature field is one of the fundamental conditions for the spin-exchange relaxation-free (SERF) regime, which can be accomplished by electric heating chip without introducing stray field. Therefore, a nonmagnetic heating chip composed of double identical ring-structure layers with a silicon oxide insulating layer between them is carefully designed and fabricated with the material of nichrome alloy on a borosilicate glass substrate by Micro Electro-Mechanical Systems (MEMS) technology. What's more, the influence of annealing treatment process on the microstructure of the heating chip is characterized and explicated utilizing modern surface science technique, including four-probe meter, X-ray diffraction (XRD) and atomic force microscope (AFM). Then, the integrated miniature single-beam SERF atomic magnetometer is developed based on the microfabricated heating chip. The temperature stability of heating chip is tested with the value less than +/- 10 mK at 120 degrees C by the proportional integral derivative (PID) control program, and the magnetic current coefficient is determined of only 0.506 nT/mA by the spin resonance response of the SERF atomic magnetometer near the zero field. Finally, the developed SERF atomic magnetometer achieves a high measuring sensitivity of 70 fT/Hz1/ 2. These experimental results provide a new avenue for the wafer-level microfabrication of the high-performance non-magnetic heating chip. More importantly, the presented work paves the way towards chip-scale atomic magnetometers with high sensitivity and mm-scale spatial resolution in the applications of magnetic source imaging and magnetic anomaly detection.

Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry

On-Chip Heating Noise Suppression of 3d Chip-Scale Atomic Magnetometer Using Single-Layer Shifted Heater

The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer

Three Dimensional Compensation Spherical Coils for Compact Atomic Magnetometers

In-Situ Measurement of Electrical-Heating-Induced Magnetic Field for an Atomic Magnetometer.

Wafer-Level Optical Packaging For Chip-Scale Atomic Magnetometers

Fabrication Of Wafer-Level Micro Silicon Heaters For Chip Scale Atomic Magnetometers

Wafer-level Integration of Micro Heaters on an Alkali Vapor Cell for Chip-Scale Atomic Magnetometers

Integrated optical probing scheme enabled by localized-interference metasurface for chip-scale atomic magnetometer

Integration of Micro-Fabricated Scalar Magnetometer with the Combination of Mx and Mz Techniques

Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell

A sensitive and stable atomic vector magnetometer for weak field detections using double orthogonal multipass cavities

Chip-scale high Q-factor glassblown microspherical shells for magnetic sensing

Compact M z atomic magnetometer with a thick silicon core MEMS vapor cell

An Integrated Single-Beam Three-Axis High-Sensitivity Magnetometer

Microfabricated SERF Atomic Magnetometers for Measurement of Weak Magnetic Field

Mz Atomic Magnetometer Using A 3D Mems Glass Alkali Vapor Cell with Vertical Sidewalls

Temperature control of atomic gas chamber using a non magnetic heating chip fabricated on quartz substrate

A study of Quantum-enhanced Magnetometer Using a Single High-spin Nucleus in Silicon

Simultaneous Detection of Position and Temperature of Micromagnet Using a Quantum Microscope

Chip-Scale Integration of a SERF-Regime Optical Magnetometer