On-Chip Heating Noise Suppression of 3d Chip-Scale Atomic Magnetometer Using Single-Layer Shifted Heater

Ziji Wang,Junming Wu,Jin Zhang,Jintang Shang

DOI: https://doi.org/10.1109/mems49605.2023.10052410

2023-01-01

Abstract:This paper proposes a novel 3D MEMS atomic chip with single-layer on-chip heater for atomic magnetometry. A micro spherical vapor cell and an on-chip micro heater are monolithically integrated onto a single 3D atomic chip for the first time. Meanwhile, the impact of heating noise on magnetometer performance is effectively suppressed by lateral shifting the on-chip heater from probing region. Comparing to atomic chip heated by unshifted heater, experiments demonstrate that shifted heater reduces sensor noise by more than 90%, and the sensor sensitivity is increased by more than 12 times while reducing fabrication cost and improving device integration.