Thermodynamic Analysis and CVT Growth of ZnSe Single Crystal

Chang Liu
2008-01-01
Abstract:The thermodynamic properties of transporting reactions in ZnSe-I_2,-H_2,-HCI and -NH_4Cl chemical vapor transport systems were analyzed by solving sets of equations with numerical methods. The results show that ZnSe-NH_4Cl system has the properties of high total pressure and moderate reaction enthalpy change.The hydrogen (H_2) produced through decomposition of NH3 is capable to adjust the transporting component partial pressure of H_2Se.Referring to the component partial pressure in ZnSe-I2 system,the process parameters in ZnSe-NH_4Cl system are primarily selected for ZnSe single crystal growth.The concentration of NH_4Cl ranges from 0.5 to 1.0mg/mL at the growth temperature of about 1000℃.An as-grown ZnSe single crystal is obtained with dimension of 8mm×6mm×4mm.The full width at half maximum of X-ray double crystals rocking curve on (111) as-grown surface is 60.48 and the etching pits density (EPD) is about (4.5-5.0)×10~4/cm~2.
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